Sub-wavelength structures for reduction of reflective properties
View Patent ↗A method for manufacturing optically-transparent lids includes etching sub-wavelength structures on a surface of a lid wafer. The structures may be arrayed in a hexagonally closed-packed pattern.
1. A lid wafer for an integrated circuit device comprising:
a first side;
a second side;
a cavity disposed within the first side;
one or more sub-wavelength structures disposed on the first side, wherein the one or more sub-wavelength structures are smaller in diameter and height than a wavelength of incident light; and
one or more sub-wavelength structures disposed on the second side wherein the one or more sub-wavelength structures are smaller in diameter and height than a wavelength of incident light.
2. The lid wafer of claim 1 , wherein the one or more sub-wavelength structures are arrayed in a hexagonal close-packed pattern.
3. The lid wafer of claim 1 , wherein the height of each one or more sub-wavelength structure is a function of the index of refraction of the lid wafer.
4. The lid wafer of claim 1 , wherein the spacing between respective sub-wavelength structures is a function of the diameter of respective individual one or more sub-wavelength structures and the index of refraction of the lid wafer.
5. The lid wafer of claim 1 , further comprising a low index of refraction material deposited between the one or more sub-wavelength structures on the first side.
6. The lid wafer of claim 1 , further comprising a low index of refraction material deposited between the one or more sub-wavelength structures on the second side.
7. A lid wafer for an integrated circuit device comprising:
a first side;
a second side;
a cavity disposed within the first side;
one or more sub-wavelength structures disposed within the cavity;
one or more sub-wavelength structures disposed on the second side;
a fill material deposited between the one or more sub-wavelength structures on the first;
a fill material deposited between the one or more sub-wavelength structures on the second side, wherein the one or more sub-wavelength structures are arrayed in a hexagonal close-packed pattern, and wherein the one or more sub-wavelength structures are smaller in diameter and height than the wavelength of any incident light in the infrared spectrum, wherein the height of respective sub-wavelength structures is a function of the index of refraction of the lid wafer, and wherein the spacing between respective sub-wavelength structures is a function of the diameter of each respective sub-wavelength structure and the index of refraction of the lid wafer.