VCSEL mode-transforming phase filter with enhanced performance
View Patent ↗A vertical cavity surface emitting laser (VCSEL) in which a higher order lasing mode produces a Gaussian-like single mode far field beam intensity pattern. Such a VCSEL includes a protective surface deposition on a VCSEL structure, and phase filter elements on the surface deposition. The surface deposition and the phase filter elements implement an optical phase filter that induces optical path difference such that a single mode far field beam intensity pattern results when the VCSEL operates in a higher order lasing mode. The VCSEL can include structures that enhance a selected higher-order operating mode and/or that suppress unwanted operating modes.
1. A VCSEL device, comprising:
a VCSEL structure for producing higher-order mode laser light;
a protective optical material layer on the VCSEL structure, wherein the protective optical material layer is for shifting the phase of the higher-order mode laser light by a half-wavelength (λ/2); and
a phase filter on the protective optical material, the phase filter comprised of equal numbers of first phase filter elements and second phase filter elements, wherein the first and second phase filter elements are for shifting the phase of the higher-order mode laser light by phase shifts that differ by about (2m+1)(λ/2), wherein m=0, 1, 2, 3, . . . .
2. A VCSEL device according to claim 1 , wherein the first and second phase filter elements are pie-shaped.
3. A VCSEL device according to claim 1 , wherein the first and second phase filter elements are comprised of different materials.
4. A VCSEL device according to claim 3 , wherein the first phase filter elements are comprised of air.
5. A VCSEL device according to claim 4 , wherein the thickness of the second phase filter elements is d=(2m+1)(λ/2)/(n 2 −1), where n 2 is the refractive index of the material that comprises the second phase filter elements.
6. A VCSEL device according to claim 1 , wherein the second phase filter elements include a material selected from a group consisting of SiO 2 , Si 3 N 4 , TiO 2 , semiconductor materials, or combinations thereof.
7. A VCSEL device according to claim 1 , wherein the protective optical material layer is one of an oxide, a nitride, a semiconductor alloy lattice-matched to a base material of the VCSEL, and combinations thereof.
8. A VCSEL device, comprising:
a VCSEL structure for producing a laser light;
a protective optical material layer on the VCSEL structure, wherein the protective optical material layer is for shifting the phase of the laser light by a half-wavelength (λ/2); and
a phase filter on the protective optical material, the phase filter including first phase filter elements and second phase filter elements, wherein the first and second phase filter elements are for shifting the phase of the laser light by phase shifts that differ by about (2m+1)(λ/2), wherein m=0, 1, 2, 3, . . . .
9. A VCSEL device according to claim 8 , wherein the first and second phase filter elements are pie-shaped.
10. A VCSEL device according to claim 8 , wherein the first phase filter elements include a first material and the second phase filter elements include a second material, the first and second materials being different.
11. A VCSEL device according to claim 8 , wherein the first phase filter elements include air.
12. A VCSEL device according to claim 8 , wherein the second phase filter elements have a thickness of d=(2m+1)(λ/2)/(n 2 −1), where n 2 is the refractive index of the second material of the second phase filter elements.
13. A VCSEL device according to claim 8 , wherein the second phase filter elements include a material selected from the group consisting of SiO 2 , Si 3 N 4 , TiO 2 , semiconductor materials, and combinations thereof.
14. A VCSEL device according to claim 8 , wherein the protective optical material layer is one of an oxide, a nitride, a semiconductor alloy lattice-matched to a base material of the VCSEL, and combinations thereof.
15. A VCSEL device according to claim 8 , wherein a number of the first phase filter elements and a number of the second phase filter elements are same.
16. A VCSEL device, comprising:
a VCSEL structure for producing a laser light;
a protective optical means on the VCSEL structure for shifting the phase of the laser light by a half-wavelength (λ/2); and
a phase filter on the protective optical material, the phase filter including first phase filter elements and second phase filter elements, wherein the first and second phase filter elements are for shifting the phase of the laser light by phase shifts that differ by about (2m+1)(λ/2), wherein m=0, 1, 2, 3, . . . .
17. A VCSEL device, comprising:
a VCSEL structure for producing lower-order mode laser light;
a protective optical material layer on the VCSEL structure, wherein the protective optical material layer is for shifting the phase of the higher-order mode laser light by a half-wavelength (λ/2); and
a phase filter on the protective optical material, the phase filter comprised of equal numbers of first phase filter elements and second phase filter elements, wherein the first and second phase filter elements are for shifting the phase of the lower-order mode laser light by phase shifts that differ by about (2m+1)(λ/2), wherein m=0, 1, 2, 3, . . . .