IP Library › Granted Patent US 6,783,080
Granted Patent Utility
US 6,783,080 · Confirmation No. 5754

SYSTEMS AND METHODS FOR CONTROLLING TEMPERATURES OF PROCESS TOOLS

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2015-03-10 OATH Oath or Declaration filed 47 View
2004-06-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-27 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-27 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-04-27 892 List of references cited by examiner 1 View
2004-04-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-27 FWCLM Index of Claims 1 View
2004-04-27 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-27 1449 List of References cited by applicant and considered by examiner 1 View
2004-04-22 SRNT Examiner's search strategy and results 6 View
2003-10-21 DRW Drawings-only black and white line drawings 10 View
2003-10-21 OATH Oath or Declaration filed 3 View
2003-10-21 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-07-22 PEFN Pre-Exam Formalities Notice 2 View
2003-05-16 TRNA Transmittal of New Application 2 View
2003-05-16 SPEC Specification 30 View
2003-05-16 CLM Claims 6 View
2003-05-16 ABST Abstract 1 View
2003-05-16 DRW Drawings-only black and white line drawings 10 View
2003-05-16 OATH Oath or Declaration filed 3 View
2003-05-16 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,783,080
App. No.
10/439,299
Filed
2003-05-16
Granted
2004-08-31
Pub. No.
US20040035851A1
Art Unit
3744
PTA
-28 days