Method of manufacturing thin film transistor
View Patent ↗After a polysilicon semiconductor film 5 and a first gate oxide film 6 are formed on a transparent insulating substrate 1, the semiconductor film 5 and the first gate oxide film 6 are patterned into an island shape to form an island part. At this time, an overhang part 8 of a visor shape is formed where side end surfaces of the first gate oxide film 6 and the semiconductor film 5 are not aligned and an end part of the first gate oxide film 6 projects slightly from a position of a side end surface of the semiconductor film 5. The overhang part 8 is removed, for example, during cleaning, which thus enhances yield.
1. A method of manufacturing a thin film transistor, comprising the steps of:
forming a first insulating film on a semiconductor film formed on a substrate;
forming an island by patterning the semiconductor film and the first insulating film into an island shape, resulting in an overhang part, wherein a side end part of said first insulating film is formed into a visor shape over a side end part of said semiconductor film;
forming a second insulating film on the island;
forming a gate electrode on the second insulating film; and
removing the overhang part;
wherein the step of removing the overhang part is performed after the step of forming the island and before the step of forming the second insulating film.
2. The method of manufacturing the thin film transistor according to claim 1 , wherein in the step of removing the overhang part, the overhang part is removed by using a chemical cleaning liquid.
3. The method of manufacturing the thin film transistor according to claim 2 , wherein in the step of removing the overhang part, the overhang part is removed by cleaning the substrate having the formed island for a time period from 1 to 60 seconds using an aqueous hydrofluoric acid solution of concentration ranging from 0.01% to 10% as the chemical cleaning liquid.
4. The method of manufacturing the thin film transistor according to claim 1 , wherein the step of removing the overhang part is carried out so that the first insulating film is partially left at least on a region positioned under an area where the gate electrode is to be formed in the step of forming the gate electrode.
5. A method of manufacturing a thin film transistor, comprising the steps of:
forming a first insulating film on a semiconductor film formed on a substrate;
forming an island by patterning the semiconductor film and the first insulating film into an island shape, resulting in an overhang part, wherein a side end part of the first insulating film making the island is formed into a visor shape over a side end part of the semiconductor film;
cleaning the substrate on which the island is formed;
forming a second insulating film on the island; and
forming a gate electrode on the second insulating film,
wherein the step of cleaning is also performed to remove the overhang part.
6. The method of manufacturing the thin film transistor according to claim 5 , wherein in the step of cleaning, the overhang part is removed by using a chemical cleaning liquid.
7. The method of manufacturing the thin film transistor according to claim 6 , wherein in the step of cleaning, the overhang part is removed by cleaning the substrate having the formed island for a time period from 1 to 60 seconds using an aqueous hydrofluoric acid solution of concentration ranging from 0.01% to 10% as the chemical cleaning liquid.
8. The method of manufacturing the thin film transistor according to claim 5 , wherein the step of cleaning is carried out so that the first insulating film is partially left at least on a region positioned under an area where the gate electrode is formed in the step of forming the gate electrode.
9. The method of manufacturing the thin film transistor according to claim 1 , wherein the semiconductor film comprises a polycrystalline semiconductor.
10. The method of manufacturing the thin film transistor according to claim 9 , further comprising:
a semiconductor film forming step, which includes forming a semiconductor film of a non-single crystal semiconductor on the substrate and annealing the semiconductor film to form a polycrystalline semiconductor film.
11. The method of manufacturing the thin film transistor according to claim 10 , wherein the non-single crystal semiconductor includes an amorphous semiconductor.
12. The method of manufacturing the thin film transistor according to claim 10 , wherein the polycrystalline semiconductor film is formed by irradiating the non-single crystal semiconductor with laser light.
13. The method of manufacturing the thin film transistor according to claim 10 , wherein processing through the formation of the first insulating film is performed in an inert atmosphere.
14. The method of manufacturing the thin film transistor according to claim 5 , wherein the semiconductor film comprises a polycrystalline semiconductor.
15. The method of manufacturing the thin film transistor according to claim 14 , further comprising:
a semiconductor film forming step, which includes a non-single crystal semiconductor film forming step of forming a semiconductor film of a non-single crystal semiconductor on the substrate and an annealing step of crystallizing the semiconductor film of the non-single crystal semiconductor to form the semiconductor film of the polycrystalline semiconductor through annealing processing.
16. The method of manufacturing the thin film transistor according to claim 15 , wherein the non-single crystal semiconductor includes an amorphous semiconductor.
17. The method of manufacturing the thin film transistor according to claim 15 , wherein in the annealing step, the semiconductor film of the polycrystalline semiconductor is formed by irradiating the semiconductor film of the non-single crystal semiconductor with laser light.
18. The method of manufacturing the thin film transistor according to claim 15 , wherein from the start of the annealing step until the end of the step of forming the first insulating film, predetermined processing is performed in an inert atmosphere.