High resolution overlay alignment systems for imprint lithography
View Patent ↗A system of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
1. An imprint lithography system having a template, said system comprising:
a mount to hold said template; and
a device coupled to said mount to vary dimensions of said template.
2. The system as recited in claim 1 , wherein said device includes a member to vary a temperature of said template to cause said dimensions to vary.
3. The system as recited in claim 1 , wherein said device further includes a plurality of piezo actuators attached to apply a force to said template and vary said dimensions.
4. The system as recited in claim 1 , wherein said template further includes two sides extending transversely to each other, and said device includes a plurality of piezo actuators, with more than ore of said plurality of piezo actuators being coupled to each of said two sides to apply a force thereto.
5. The system as recited in claim 1 , wherein said template further includes two sides extending transversely to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
6. The system as recited in claim 1 , wherein said template further includes two sides disposed opposite to each other, and said device includes a plurality of piezo actuators, with more than one of said plurality of piezo actuators being coupled to each of said two sides to apply a force thereto.
7. The system as recited in claim 1 , wherein said template further includes two sides disposed opposite to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
8. The system as recited in claim 1 , wherein said template further includes a plurality of sides, and said device includes a plurality of piezo actuators, with more than one of said plurality of piezo actuators coupled to each of said plurality of sides to apply a force thereto.
9. The system as recited in claim 1 , wherein said template further includes a plurality of sides, and said device further includes a plurality of piezo actuators, with one of said plurality of piezo actuators being coupled to each of said plurality of sides to apply a force thereto.
10. The system as recited in claim 1 , wherein said device includes a piezo actuator attached to apply a force to said template and vary said dimensions.
11. The system as recited in claim 10 , wherein said force of said actuator further comprises a compressive force, with said compressive force being applied to at least a portion of the template.
12. The system as recited in claim 10 , wherein said force of said actuator further comprises a stretching force, with said stretching force being applied to at least a portion of the template.
13. The system as recited in claim 10 , wherein said template further includes template alignment marks and further including a substrate disposed opposite to said template and having substrate alignment marks and first and second fluxes of light, each of said first and second fluxes light having differing characteristics associated therewith, defining first and second characteristics, with said substrate alignment marks and said template alignment marks being responsive to said first characteristics, and defining a first response, and responsive to said second characteristics, defining a second response differing from said first response.
14. An imprint lithography system having a template, said template having template alignment marks, said system comprising:
a mount to hold said template;
a stage disposed opposite to said template;
a substrate disposed on said stage, with said substrate having substrate alignment marks;
an illumination system to impinge light upon said substrate alignment marks and said template alignment marks;
a detection system in optical communication with said substrate alignment marks and said template alignment marks; and
a device coupled to said mount to vary dimensions of said template to place said template alignment marks and said substrate alignment marks in a desired spatial orientation.
15. The system as recited in claim 14 , wherein said device further includes a member to vary a temperature of said template to cause said dimensions to vary.
16. The system as recited in claim 14 , wherein said template further includes two sides extending transversely to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
17. The system as recited in claim 14 , wherein said template further includes two sides positioned opposite to each other, and said device further includes a plurality of piezo actuators attached to apply a force to said two sides and alter said dimensions.
18. The system as recited in claim 14 , wherein said template further includes a plurality of sides, and said device further includes a plurality of piezo actuators attached to apply a force to said plurality of sides and alter said dimensions.
19. The system as recited in claim 14 , wherein said illumination system further includes first and second fluxes of light, each of said first and second fluxes light having differing characteristics associated therewith, defining first and second characteristics, with said substrate alignment marks and said template alignment marks being responsive to said first characteristics, and defining a first response, and responsive to said second characteristics, defining a second response differing from said first response.
20. The system as recited in claim 14 , wherein said device includes a piezo actuator attached to said mount to apply a force to vary said dimensions.
21. The system as recited in claim 20 , wherein said force comprises a compressive force.
22. The system as recited in claim 20 , wherein said force comprises a stretching force.
23. An imprint lithography system having a template, said system comprising:
a mount to hold said template; and
a device coupled to said mount to vary dimensions of said template by applying forces to said template, with said forces being selected from a set of forces comprising a compressive force and a stretching force.
24. The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along a first axis and said stretching force along a second axis, with said second axis extending transversely to said first axis.
25. The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along a first axis and a heating device connected to said mount to create said stretching force along a second axis, with said second axis extending transversely to said first axis.
26. The imprint lithography system as recited in claim 23 , wherein said device includes a plurality of piezo actuators coupled to said template to apply said compressive force along first and second axes, with said first axis extending transversely to said second axis.
27. The imprint lithography system as recited in claim 23 further including a heating system in thermal communication with said template to expand said template along two transverse axes.
28. The imprint lithography system as recited in claim 23 further including a heating system in thermal communication with said template to constrict said template along two transverse axes.