Method of varying template dimensions to achieve alignment during imprint lithography
View Patent ↗A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
1. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:
locating a liquid between said template and said substrate;
placing said template and said substrate in superimposition; and
varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks concurrently with said template being in contact with a portion of said liquid.
2. The method as recited in claim 1 , wherein varying said dimensions further includes applying a compressive force to said template.
3. The method as recited in claim 1 , wherein varying said dimensions further includes applying a stretching force to said template.
4. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.
5. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.
6. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.
7. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different.
8. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.
9. The method as recited in claim 1 , wherein said template further includes a first side and a second side extended transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.
10. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.
11. The method as recited in claim 1 , wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.
12. The method as recited in claim 1 , wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different forces.
13. The method as recited in claim 1 , wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.
14. The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with each of said forces being substantially the same as the remaining forces of said plurality of forces.
15. The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with one of said plurality of forces differing from the remaining forces of said plurality of forces.
16. The method as recited in claim 1 , wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each side, with a first group of forces being applied to one side of said plurality of sides, wherein said first group of forces include a first force and a second force, with said first force and said second force being substantially different.
17. The method as recited in claim 1 further including impinging actinic radiation upon said liquid to solidify said liquid.
18. The method as recited in claim 1 further including impinging actinic radiation upon said liquid to form a solidified layer, and separating said template from said solidified layer.
19. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:
locating a liquid between said template and said substrate;
placing said template and said substrate in superimposition;
varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks by applying a plurality of forces to said template, concurrently with said template being in contact with a portion of said liquid; and
impinging actinic radiation upon said liquid to solidify said liquid.
20. The method as recited in claim 19 , wherein varying said dimensions further includes applying a compressive force to said template.
21. The method as recited in claim 19 , wherein varying said dimensions further includes applying a stretching force to said template.
22. The method as recited in claim 19 wherein varying said dimensions further includes applying a plurality of forces to a first side of said template, with a set of said plurality of forces differing from remaining forces of said plurality of forces.
23. The method as recited in claim 19 wherein impinging actinic radiation further includes forming a solidified layer from said liquid, with said method further including separating said template from said solidified layer.
24. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:
placing said template and said substrate in superimposition; and
controlling thermal properties of said substrate and said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks.
25. The method as recited in claim 24 wherein controlling said thermal properties further includes altering a temperature of said template.
26. The method as recited in claim 25 wherein altering said temperature further includes enlarging said template.
27. The method as recited in claim 25 wherein altering said temperature further includes contracting said template.
28. The method as recited in claim 24 further including locating a liquid between said template and said substrate, and wherein controlling said thermal properties further includes varying dimensions of said template concurrently with said template being in contact with a portion of said liquid.
29. The method as recited in claim 28 further including impinging actinic radiation upon said liquid to form a solidified layer.
30. The method as recited in claim 29 further including separating said template from said solidified layer.