Method of manufacturing a mask for evaporation
View Patent ↗A mask frame assembly for evaporation includes a mask and a frame which supports the mask. The mask includes a metal layer having a predetermined pattern, and a coating layer which is formed on a surface of the metal layer so as to increase a precision of the predetermined pattern and a surface roughness of the mask.
1. A method of manufacturing a mask for evaporation, the method comprising:
providing a plate having a pattern corresponding to openings to be formed in the mask;
forming a lower coating layer to a predetermined thickness on a portion of the plate not corresponding to the openings to be formed in the mask;
forming a metal layer to a predetermined thickness on the lower coating layer, wherein the lower coating layer has a lower ductility than the metal layer; and
lifting the mask comprising the formed layers from the plate.
2. The method of claim 1 , wherein the metal layer has a thickness of 28–48 μm, and the lower coating layer has a thickness of 2–17 μm.
3. The method of claim 1 , wherein the metal layer is nickel, and the lower coating layer is an alloy of nickel and cobalt.
4. The method of claim 3 , wherein the alloy is formed of 85 weight % of the nickel and 15 weight % of the cobalt.
5. The method of claim 4 , further comprising forming an upper coating layer on the metal layer.
6. The method of claim 5 , wherein the upper coating layer has the same thickness as the lower coating layer.
7. The method of claim 1 , wherein the metal layer comprises iron, chromium and nickel, and the lower coating layer is an alloy of iron, chromium, nickel, and cobalt.
8. The method of claim 1 , wherein the lower coating layer is formed by an electro forming method.
9. The method of claim 1 , wherein the metal layer comprising iron, chromium and nickel, and the lower coating layer is an alloy comprising iron, chromium, nickel, and cobalt.
10. The method of claim 1 , wherein the forming of the metal layer includes forming strips in the metal layer to have a curved shape.
11. A method of manufacturing a mask for evaporation, the method comprising:
providing a plate having a film covering portions of the plate corresponding to openings to be formed in the mask;
forming a lower coating layer to a predetermined thickness on portions of the plate not covered by the film;
forming a metal layer to a predetermined thickness on the lower coating layer, wherein the lower coating layer has a lower ductility than the metal layer; and
lifting the formed layers from the plate.
12. The method of claim 11 , wherein the metal layer has a thickness of 28–48 μm, and the lower coating layer has a thickness of 2–17 μm.
13. The method of claim 11 , wherein the metal layer is nickel, and the lower coating layer is an alloy of nickel and cobalt.
14. The method of claim 13 , wherein the alloy is formed of 85 weight % of the nickel and 15 weight % of the cobalt.
15. The method of claim 14 , further comprising forming an upper coating layer on the metal layer.
16. The method of claim 15 , wherein the upper coating layer has a same thickness as the lower coating layer.
17. The method of claim 15 , wherein the lower coating layer is formed by an electro forming method.
18. The method of claim 11 , wherein the forming of the metal layer includes forming strips in the metal layer to have a curved shape.
19. A method of manufacturing a mask for evaporation, the method comprising:
providing a plate having a pattern corresponding to openings to be formed in the mask;
forming a first layer to a predetermined thickness on a portion of the plate not corresponding to the openings to be formed in the mask;
forming a second layer to a predetermined thickness on the first layer; and
lifting the mask comprising the formed layers from the plate, wherein:
the second layer is formed of a first metal, and
the first layer is formed of an alloy comprising the first metal and a second metal, the alloy having a ductility less than a ductility of the first metal.
20. The method of claim 19 , wherein the first metal is nickel and the second metal is cobalt.
21. The method of claim 20 , further comprising:
forming a third layer on the second layer, the third layer formed of a same alloy as the first layer.
22. The method of claim 19 , wherein the alloy is formed of 85 weight % of nickel and 15 weight % of cobalt.
23. The method of claim 22 , further comprising:
forming a third layer on the second layer, the third layer formed of a same alloy as the first layer.
24. The method of claim 19 , further comprising:
forming a third layer on the second layer, the third layer formed of a same alloy as the first layer.
25. The method of claim 24 , wherein:
the first metal is another alloy comprising iron, chromium and nickel, and
the second metal is cobalt.
26. The method of claim 19 , wherein:
the first metal is another alloy comprising iron, chromium and nickel, and the second metal is cobalt.
27. The method of claim 19 , wherein the forming of the second layer includes forming strips in the second layer to have a curved shape.