IP Library Granted Patent US 6,911,763
Granted Patent B2
US 6,911,763 · App. 10/452,777 · Granted Jun 28, 2005

Closed loop mover assembly with measurement system

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Quick Facts
Patent No.
US 6,911,763
App. No.
10/452,777
Granted
Jun 28, 2005
Kind
B2
Abstract

A mover assembly ( 16 ) that moves or positions an object ( 12 ) includes a mover output ( 226 ), an actuator ( 230 ), and a measurement system ( 20 ). The mover output ( 226 ) is connected to the object ( 12 ), and the actuator ( 230 ) causes the mover output ( 226 ) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system ( 20 ) directly measures the movement of the mover output ( 226 ) and provides feedback regarding the position of the mover output ( 226 ).

Claims (21)

1. A mover assembly that moves or positions an object, the mover assembly comprising:

a mover output that is coupled to the object;

an actuator that causes the mover output to rotate about a first axis and move along the first axis; and

a measurement system that directly measures the movement of the mover output, the measurement system including a first encoder component that is secured to the mover output and a second encoder component positioned adjacent to the first encoder component, wherein the first encoder component rotates concurrently with the mover output about the first axis and moves concurrently with the mover output along the first axis, and wherein the second encoder component moves concurrently with the mover output along the first axis.

2. The mover assembly of claim 1 wherein the first encoder component includes a plurality of lines and the second encoder component includes an encoder head.

3. The mover assembly of claim 1 wherein the measurement system measures the movement of the mover output about the first axis.

4. The mover assembly of claim 3 wherein the movement of the mover output along the first axis is calculated using information about the movement of the mover output about the first axis.

5. The mover assembly of claim 1 wherein the actuator includes a piezoelectric element that causes rotation of the mover output.

6. The mover assembly of claim 5 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and the piezoelectric element moves the jaw elements relative to each other.

7. The mover assembly of claim 1 further comprising a control system that receives measurement information from the measurement system and performs positional correction on the measurement information.

8. The mover assembly of claim 1 wherein the mover output includes a threaded surface having a thread pitch and movement of the mover output along the first axis is calculated utilizing the thread pitch.

9. A precision apparatus including an object and the mover assembly of claim 1 .

10. A method for moving or positioning an object, the method comprising the steps of:

connecting a mover output to the object;

moving the mover output with an actuator along a first axis and about the first axis; and

directly measuring the movement of the mover output by securing a first encoder component to the mover output and positioning a second encoder component adjacent to the first encoder component, wherein the first encoder component rotates concurrently with the mover output about the first axis and moves concurrently with the mover output along the first axis, and wherein the second encoder component moves concurrently with the mover output along the first axis.

11. The method of claim 10 wherein the first encoder component includes a plurality of lines and the second encoder component includes an encoder head.

12. The method of claim 10 wherein the step of directly measuring includes measuring the movement of the mover output about the first axis.

13. The method of claim 10 wherein the actuator includes a piezoelectric element that causes rotation of the mover output.

14. The method of claim 13 wherein the actuator includes a pair of opposed jaw elements that engage the mover output and the piezoelectric element moves the jaw elements relative to each other.

15. The method of claim 10 further comprising the step of performing positional correction on the measured movement of the mover output.

Assignments (13)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2009
From: NEW FOCUS, INC.
To: NEWPORT CORPORATION
Reel/Frame 023627/0985 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 30, 2003
From: ZIEGLER, ANDREW; ARNONE, DAVID F.; GREEN, EVAN DRAKE HARRIMAN
To: NEW FOCUS, INC., A DELAWARE CORPORATION
Reel/Frame 014547/0446 →