IP Library › Granted Patent US 6,709,952
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US 6,709,952 · Confirmation No. 1041

METHOD OF FORMING A BOTTOM OXIDE LAYER IN A TRENCH

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Quick Facts
Patent No.
US 6,709,952
App. No.
10/453,771
Filed
2003-06-02
Granted
2004-03-23
Pub. No.
US20040005766A1
Art Unit
2812
PTA
0 days