Method and apparatus for displaying test results and recording medium
View Patent ↗There are provided a method and an apparatus for displaying test results and a recording medium, which allow easy detection of Devices for Testing in which probes are destroyed. The apparatus has two wafer probers, a work station, and a PC. On the basis of a display program and a display mode switching program stored in a ROM of the work station, respective test results of testing semiconductor chips by the two wafer probers are displayed on a CRT of the PC in correspondence to positions of the semiconductor chips on a wafer substrate, and, at the same time, a pass/fail ratio for each of the DFT's is displayed in parallel with the test results of the semiconductor chips.
1. A method for manufacturing a semiconductor device comprising the steps of:
testing a plurality of semiconductor chips formed on a wafer substrate by a tester including plural testing portions for testing semiconductor chips; and
on the basis of test results obtained by the tester, displaying on a same screen of a displaying device two types of information, which are
a first information which expresses test results of the semiconductor chips in accordance with positions of the semiconductor chips on the wafer substrate, and
a second information which expresses, for each of the testing portions, test results of the semiconductor chips obtained by the testing portions.
2. A method for manufacturing a semiconductor device according to claim 1 , wherein the two types of information obtained from at least two testers are displayed on the same screen of the displaying device.
3. A method according to claim 2 , wherein a display mode is switchable between at least three display modes, which are a first display mode for displaying only the first information on the screen of the displaying device, a second display mode for displaying only the second information on the screen of the displaying device, and a third display mode for displaying both the first information and the second information on the screen of the displaying device.
4. A method according to claim 2 , wherein the test results of the second information is at least one of a detection ratio of defective semiconductor chips and a value reflecting the detection ratio.
5. A method according to claim 1 , wherein a display mode is switchable between at least three display modes, which are a first display mode for displaying only the first information on the screen of the displaying device, a second display mode for displaying only the second information on the screen of the displaying device, and a third display mode for displaying both the first information and the second information on the screen of the displaying device.
6. A method according to claim 5 , wherein the test results of the second information is at least one of a detection ratio of defective semiconductor chips and a value reflecting the detection ratio.
7. A method according to claim 1 , wherein the test results of the second information is at least one of a detection ratio of defective semiconductor chips and a value reflecting the detection ratio.
8. A method for manufacturing a semiconductor device comprising the steps of:
testing a plurality of semiconductor chips formed on a wafer substrate by a tester including plural testing portions for testing semiconductor chips; and
displaying on a screen of a displaying device information based on test results obtained by the tester,
wherein a display mode is switchable between at least three display modes, which area first display mode for displaying only a first information on the screen of the displaying device, a second display mode for displaying only a second information on the screen of the displaying device, and a third display mode for displaying simultaneity both the first information and the second information on the same screen of the displaying device,
wherein the first information expresses test results of the semiconductor chips in accordance with positions of the semiconductor chips on the wafer substrate, and
wherein the second information expresses, for each of the testing portions, test results of the semiconductor chips obtained by the testing portions.
9. A method according to claim 8 , wherein the test results of the second information is at least one of a detection ratio of defective semiconductor chips and a value reflecting the detection ratio.