Flat luminescence lamp and method for manufacturing the same
View Patent ↗A flat luminescent lamp and a method for manufacturing the same are disclosed in the present invention. More specifically, a flat luminescent lamp includes first and second substrates each having a plurality of grooves in sides which the first and second substrates face into each other, first and second electrodes in the grooves, first and second phosphor layers in the first and second substrates including the first and second electrodes, respectively, and a frame for sealing the first and second substrates.
1. A method for manufacturing a flat luminescent lamp, comprising the steps of:
forming a plurality of grooves in first and second substrates;
forming an electrode material layer on the first and second substrates including the grooves;
forming first and second electrodes in the grooves by selectively removing the electrode material layer, the first and second electrodes having a width narrower than the grooves such that a gap is defined between each of the electrodes and a respective one of the grooves;
forming phosphor layers on the first and second substrates including the first and second electrodes; and
sealing the first and second substrates with one another.
2. The method of claim 1 , wherein the step of forming the first and second electrodes includes the steps of:
depositing a photoresist material on the electrode material layer;
patterning the photoresist material using exposure and developing processes; and
etching the electrode material layer using the patterned photoresist material as a mask.
3. The method of claim 1 , wherein the step of forming first and second electrodes is performed by a chemical mechanical polishing process.
4. The method of claim 1 , further comprising the step of forming a dielectric layer after the step of forming first and second electrodes.
5. The method of claim 4 , further comprising the step of forming a reflecting material layer on the dielectric layer.
6. The method of claim 1 , further comprising the step of injecting a phosphor gas between the first and second substrates through a gas injection hole before the step of sealing the first and second substrates.
7. A method for manufacturing a flat luminescent lamp, comprising the steps of:
forming a plurality of grooves in a first substrate;
forming an electrode material layer on the first substrate including the grooves;
forming first and second electrodes in the grooves by selectively removing the electrode material layer, the first and second electrodes having a width narrower than the grooves such that a gap is defined between each of the electrodes and a respective one of the grooves;
forming phosphor layers on the first substrate including the first and second electrodes and a second substrate; and
sealing the first and second substrates with one another.
8. The method of claim 7 , wherein the step of forming the first and second electrodes includes the steps of:
depositing a photoresist material on the electrode material layer;
patterning the photoresist material using exposure and developing processes; and
etching the electrode material layer using the patterned photoresist material as a mask.
9. The method of claim 7 , wherein the step of forming first and second electrodes is performed by a chemical mechanical polishing process.
10. The method of claim 7 , further comprising the step of forming a dielectric layer after the step of forming first and second electrodes.
11. The method of claim 10 , further comprising the step of forming a reflecting material layer on the dielectric layer.
12. The method of claim 7 , further comprising the step of injecting a phosphor gas between the first and second substrates through a gas injection hole before the step of sealing the first and second substrates.