Methods for forming polycrystalline silicon layer and fabricating polycrystalline silicon thin film transistor
View Patent ↗A method of forming a polycrystalline silicon layer includes: forming an amorphous silicon layer on a substrate; depositing a catalyst metal on the amorphous silicon layer; disposing first and second electrodes contacting the amorphous silicon layer along a first direction; heating the amorphous silicon layer under a first temperature and simultaneously applying a first voltage to the first and second electrodes to form a first crystallized amorphous silicon layer; disposing third and fourth electrodes contacting the first crystallized amorphous silicon layer along a second direction, the second direction being different from the first direction; and heating the first crystallized amorphous silicon layer under a second temperature and simultaneously applying a second voltage to the third and fourth electrodes to form a secondly crystallized amorphous silicon layer.
1. A method of forming a polycrystalline silicon layer from an amorphous silicon layer on a substrate, comprising:
depositing a catalyst metal on the amorphous silicon layer;
disposing first and second electrodes contacting the amorphous silicon layer along a first direction;
heating the amorphous silicon layer under a first temperature and simultaneously applying a first voltage to the first and second electrodes to form a first crystallized amorphous silicon layer;
disposing third and fourth electrodes contacting the first crystallized amorphous silicon layer along a second direction, the second direction being different from the first direction; and
heating the first crystallized amorphous silicon layer under a second temperature and simultaneously applying a second voltage to the third and fourth electrodes to form a secondly crystallized amorphous silicon layer.
2. The method according to claim 1 , wherein each of the first and second temperatures is within a range of about 450° C. to about 600° C.
3. The method according to claim 1 , wherein the first direction is substantially perpendicular to second direction.
4. The method according to claim 1 , wherein there is a gap between the first, second, third, and fourth electrodes.
5. The method according to claim 1 , wherein the first and second voltages are less than.
6. The method according to claim 1 , wherein the first and second voltages are within the range of 500 V to 2000 V.
7. The method according to claim 1 , wherein the first voltage is the same value as the second voltage.
8. A method of forming a polycrystalline silicon layer on an amorphous silicon layer on a substrate, comprising:
depositing a catalyst metal on the amorphous silicon layer;
disposing first, second, third and fourth electrodes contacting the amorphous silicon layer such that the first and second electrodes are disposed along a first direction and the third and fourth electrodes are disposed along a second direction, the second direction being different from the first direction; and
heating the amorphous silicon layer under a temperature and simultaneously applying a first voltage to the first and second electrodes and a second voltage to the third and fourth electrodes.
9. The method according to claim 8 , wherein the first direction is substantially perpendicular to second direction.
10. The method according to claim 8 , wherein there is a gap between the first, second, third, and fourth electrodes.
11. The method according to claim 8 , wherein the first and second voltages are less than 10,000 V.
12. The method according to claim 8 , wherein the first and second voltages are within the range of 500 V to 2000 V.
13. The method according to claim 8 , wherein the first voltage is applied from a first power supply connected to the first and second electrodes, wherein the second voltage is applied from a second power supply connected to the third and fourth electrodes.
14. The method according to claim 8 , wherein the first voltage is the same value as the second voltage.
15. The method according to claim 14 , wherein the first and second voltages are applied from a power supply connected to the first, second, third and fourth electrodes.
16. The method according to claim 8 , wherein the temperature is within a range of about 450° C. to about 600° C.
17. A method of forming a polycrystalline silicon thin film transistor, comprising:
forming an amorphous silicon layer on a substrate;
depositing a catalyst metal on the amorphous silicon layer;
disposing first and second electrodes contacting the amorphous silicon layer along a first direction;
heating the amorphous silicon layer under a first temperature and simultaneously applying a first voltage to the first and second electrodes to form a first crystallized amorphous silicon layer;
disposing third and fourth electrodes contacting the first crystallized amorphous silicon layer along a second direction, the second direction being different from the first direction;
heating the first crystallized amorphous silicon layer under a second temperature and simultaneously applying a second voltage to the third and fourth electrodes to form a polycrystalline silicon layer;
patterning the polycrystalline silicon layer to form an active layer;
forming a gate insulating layer on the active layer;
forming a gate electrode on the gate insulating layer;
doping the active layer with impurities to form source and drain regions in the active layer;
forming an interlayer insulating layer on the gate electrode, the interlayer insulating layer having source contact hole exposing the source region and drain contact hole exposing the drain region; and
forming source and drain electrodes on the interlayer insulating layer, the source electrode being connected to the source region through the source contact hole, the drain electrode being connected to the drain region through the drain contact hole.
18. The method according to claim 17 , further comprising forming a buffer layer between the substrate and the amorphous silicon layer.
19. The method according to claim 17 , wherein the buffer layer includes one of silicon nitride (SiN x ) and silicon oxide (SiO 2 ).
20. The method according to claim 17 , wherein each of the first and second temperatures is within a range of about 450° C. to about 600° C.
21. The method according to claim 17 , wherein the first direction is substantially perpendicular to second direction.
22. The method according to claim 17 , wherein there is a gap between the first, second, third, and fourth electrodes.
23. The method according to claim 17 , wherein the first and second voltages are less than 10,000 V.
24. The method according to claim 17 , wherein the first and second voltages are within the range of 500 V to 2000 V.
25. The method according to claim 17 , wherein the first voltage is the same value as the second voltage.
26. A method of forming a polycrystalline silicon thin film transistor, comprising:
forming an amorphous silicon layer on a substrate;
depositing a catalyst metal on the amorphous silicon layer;
disposing first, second, third and fourth electrodes contacting the amorphous silicon layer such that the first and second electrodes are disposed along a first direction and the third and fourth electrodes are disposed along a second direction, the second direction being different from the first direction;
heating the amorphous silicon layer under a temperature and simultaneously applying a first voltage to the first and second electrodes and a second voltage to the third and fourth electrodes to form a polycrystalline silicon layer;
patterning the polycrystalline silicon layer to form an active layer;
forming a gate insulating layer on the active layer;
forming a gate electrode on the gate insulating layer;
doping the active layer with impurities to form source and drain regions in the active layer;
forming an interlayer insulating layer on the gate electrode, the interlayer insulating layer having source contact hole exposing the source region and drain contact hole exposing the drain region; and
forming source and drain electrodes on the interlayer insulating layer, the source electrode being connected to the source region through the source contact hole, the drain electrode being connected to the drain region through the drain contact hole.
27. The method according to claim 26 , further comprising forming a buffer layer between the substrate and the amorphous silicon layer.
28. The method according to claim 26 , wherein the buffer layer includes one of silicon nitride (SiN x ) and silicon oxide (SiO 2 ).
29. The method according to claim 26 , wherein the first voltage is applied from a first power supply connected to the first and second electrodes, wherein the second voltage is applied from a second power supply connected to the third and fourth electrodes.
30. The method according to claim 26 , wherein the first voltage is the same value as the second voltage.
31. The method according to claim 30 , wherein the first and second voltages are applied from a power supply connected to the first, second, third and fourth electrodes.
32. The method according to claim 26 , wherein the temperature is within a range of about 450° C. to about 600° C.
33. The method according to claim 26 , wherein the first direction is substantially perpendicular to second direction.
34. The method according to claim 26 , wherein there is a gap between the first, second, third, and fourth electrodes.
35. The method according to claim 26 , wherein the first and second voltages are less than 10,000V.
36. The method according to claim 26 , wherein the first and second voltages are within the range of 500 V to 2000 V.