Surface acoustic wave filter, balanced type circuit, and communication apparatus
View Patent ↗A surface acoustic wave filter including a piezoelectric substrate, IDT electrodes which are formed on the piezoelectric substrate and are connected to balanced type terminals. Further, IDT electrodes are formed on the piezoelectric substrate and are connected to an unbalanced type terminal, connection electrodes of connecting the IDT electrodes, the IDT electrodes IDT electrodes to the balanced type terminals or the unbalanced type terminal, and a dielectric thin film formed between the piezoelectric substrate and the IDT electrodes, the IDT electrodes, the connection electrodes.
1. A surface acoustic wave filter, comprising:
a piezoelectric substrate,
a first IDT electrode which is formed on the piezoelectric substrate and is connected to a balanced type terminal,
a second IDT electrode which is formed on the piezoelectric substrate and is connected to a balanced type terminal or an unbalanced type terminal,
a connection electrode connecting the first IDT electrode and the second IDT electrode to the balanced type terminal or the unbalanced type terminal, respectively, and
a dielectric thin film formed between the piezoelectric substrate and the connection electrode but not formed between the piezoelectric substrate, and the first IDT electrode and the second IDT electrode.
2. The surface acoustic wave filter according to claim 1 , wherein the connection electrode comprises a first connection electrode connecting the first IDT electrode to the balanced type terminal and a second connection electrode connecting the second IDT electrode to the balanced type terminal or the unbalanced type terminal, and
the dielectric thin film is formed so as to further reduce at least one of (a) a capacitance between the first IDT electrode and the second IDT electrode, (b) a capacitance between the first IDT electrode and the second connection electrode, (c) a capacitance between the first connection electrode and the second IDT electrode, and (d) a capacitance between the first connection electrode and the second connection electrode.
3. The surface acoustic wave filter according to claim 1 , wherein the dielectric thin film is smaller in effective relative dielectric constant than the piezoelectric substrate.
4. The surface acoustic wave filter according to claim 3 , wherein the dielectric thin film has a piezoelectric property.
5. The surface acoustic wave filter according to claim 3 , wherein the piezoelectric substrate has an effective relative dielectric constant of about 40 or more.
6. The surface acoustic wave filter according to claim 1 , comprising a covering dielectric thin film formed on at least one of the first IDT electrode, the second IDT electrode, and the connection electrode.
7. The surface acoustic wave filter according to claim 1 , wherein the first IDT electrode and the second IDT electrode are arranged with a main propagating direction of a surface acoustic wave to be propagated on the piezoelectric substrate.
8. The surface acoustic wave filter according to claim 7 , wherein the first IDT electrode is composed of two IDT electrodes arranged respectively on both sides of the second IDT electrode along the main propagating direction.
9. The surface acoustic wave filter according to claim 7 , wherein the second IDT electrode is composed of two IDT electrodes arranged respectively on both sides of the first IDT electrode along the main propagating direction.
10. The surface acoustic wave filter according to claim 7 , further comprising two reflector electrodes between which the first IDT electrode and the second IDT electrode are arranged.
11. The surface acoustic wave filter according to claim 1 , wherein the second IDT electrode is connected to the unbalanced type terminal.
12. The surface acoustic wave filter according to claim 1 , wherein the dielectric thin film comprises silicon nitride or silicon oxide.
13. The surface acoustic wave filter according to claim 1 , wherein the piezoelectric substrate comprises lithium tantalate or lithium niobate.
14. A balanced type circuit, comprising:
a balanced type semiconductor, performing on a transmission signal for transmission and/or a reception signal for reception, and
a surface acoustic wave filter according to claim 1 , being connected to the balanced type semiconductor and filtering on the transmission signal for transmission and/or the reception signal for reception.
15. A communication apparatus, comprising:
transmitting and receiving means of performing transmission and/or reception, and
a surface acoustic wave filter according to claim 1 , performing filtering on a transmission signal for transmission and/or a reception signal for reception.