Reflecting electrode forming method and liquid crystal display
The invention provides a method of forming a reflective electrode with a reduced number of manufacturing steps and a reduced cost, and provides a liquid crystal display device to which said method is applied. A resist coating is applied on a reflective electrode film ( 3 ). Then the resist coating is exposed to light and developed in such a way that the remaining portions ( 4 ) of the resist coating having a plurality of holes ( 4 a ) remain. Then the reflective electrode film ( 3 ) is dry-etched using the remaining portions ( 4 ) as etching masks. Such a dry etching of the reflective electrode film ( 3 ) using the remaining portions ( 4 ) as etching masks forms a reflective electrode ( 30 ) having a plurality of holes ( 30 a ) in each pixel. Further, since the thickness changing region ( 30 b ) in which a thickness changes continuously is provided in the periphery of each hole ( 30 a ), the reflective electrode ( 30 ) can have a desired reflective characteristics.
1 . A method of forming a plurality of reflective electrodes on a substrate, wherein said method comprises the steps of:
forming a first film on said substrate, said first film having a material of said reflective electrode; and
patterning said first film in such a way that a portion of said first film corresponding to said reflective electrode remains;
and wherein, in said patterning step, a thickness changing region in which a thickness changes continuously is formed in said portion of said first film corresponding to said reflective electrode.
2 . A method as claimed in claim 1 , wherein, in said patterning step, said thickness changing region is formed so as to have a slope whose inclination is greater than 0 degree and smaller than 10 degrees.
3 . A method as claimed in claim 1 , wherein, in said patterning step, said thickness changing region is formed in such a way that a ratio of a width of said thickness changing region to a maximum value of thickness of said thickness changing region is equal to or greater than 1.5.
4 . A method as claimed in any one of claim 1 , wherein said patterning step comprises:
a first step of forming a photosensitive film on said first film;
a second step of exposing said photosensitive film to light and developing it to pattern said photosensitive film into a form corresponding to a pattern of said plurality of reflective electrodes;
a third step of baking said patterned photosensitive film; and
a fourth step of dry-etching said first film using said baked photosensitive film as an etching mask.
5 . A Method as claimed in claim 4 , wherein each of a plurality of pixel regions is provided with a respective one of said reflective electrodes, wherein each of said reflective electrodes has a plurality of holes, and wherein, in said second step, said photosensitive film is patterned in such a way that a portion of said photosensitive film corresponding to a periphery of each of said plurality of reflective electrodes and a portion of said photosensitive film corresponding to each of said plurality of holes are removed.
6 . A method as claimed in claim 4 , wherein each of a plurality of pixel regions is provided with at least two of said reflective electrodes, and wherein, in said second step, said photosensitive film is patterned in such a way that a portion of said photosensitive film corresponding to a periphery of each of said plurality of reflective electrodes is removed.
7 . A method as claimed in claim 1 , wherein said method comprises a step of forming a plurality of transparent electrode before said step of forming said first film.
8 . A liquid crystal display device comprising a plurality of reflective electrodes having a thickness changing region in which a thickness changes continuously.
9 . A liquid crystal display device as claimed in claim 8 , wherein each of a plurality of pixel regions is provided with one of said reflective electrodes, wherein each of said reflective electrodes has a plurality of holes, and wherein said thickness changing region is provided in a peripheray of each hole.
10 . A liquid crystal display device as claimed in claim 9 , wherein a ratio of a width of said thickness changing region to a maximum value of thickness of said thickness changing region is equal to or greater than 1.5.
11 . A liquid crystal display device as claimed in claim 8 , wherein electrodes, and wherein said thickness changing region is provided in an outer edge of each of said plurality of reflective electrodes.
12 . A liquid crystal display device as claimed in claim 11 , wherein a ratio of a width of said thickness changing region to a maximum value of thickness of said thickness changing region is equal to or greater than 1.5.
13 . A liquid crystal display device as claimed in claim 8 , wherein said thickness changing region has a slope whose inclination is greater than 0 degree and smaller than 10 degrees.
14 . A liquid crystal display device as claimed in claim 8 , wherein a transparent electrode is formed below the said reflective electrode.