Photoresist composition having a high heat resistance
View Patent ↗The present invention relates to a photoresist composition having high heat resistance used in the production process of an LCD, and more particularly, to a photoresist composition having high heat resistance, capable of decreasing process tact (a way), of process simplification, and of the retrenchment of expenditures. The inventive composition facilitates this through making it possible to skip 5 processes, such as Cr metal deposition forming a metal film, and the photo/etch/PR strip/etch steps of the whole surface of the metal, by substituting the inventive composition for the usual metal film, such that N + ion doping in production of TFT-LCD can take place due its high heat resistance.
1. A photoresist composition comprising:
(a) 10 to 50 wt % of novolak resin;
(b) 1 to 20 wt % of epoxy acrylate resin;
(c) 3 to 15 wt % of. photoactive compound; and
(d) 50 to 80 wt % of solvent,
wherein the solvent is a mixture solvent prepared by mixing 3-methoxy butyl acrylate, n-butyl acetate, and gamma-butyrolactone in a weight ratio of 30 to 70:20 to 60:1 to 10.
2. A photoresist composition comprising:
(a) 10 to 50 wt % of novolak resin;
(b) 0.05 to 20 wt % of salt of p-toluene sulfonic acid/pyridine;
(c) 3 to 15 wt % of photoactive compound; and
(d) 50 to 80 wt % of solvent.
3. The photoresist composition according to claim 1 , wherein the novolak resin is a mixture of novolak A resin having a weight-average molecular weight of 3,000 to 15,000 and novolak B resin having a weight-average molecular weight of 5,000 to 15,000, or novolak B resin having a weight-average molecular weight of 5,000 to 15,000.
4. The photoresist composition according to claim 3 , wherein the mixture ratio of novolak A resin and novolak B resin is in a weight ratio of 1:1 to 9.
5. The photoresist composition according to claim 1 , wherein the photoactive compound is a compound of a type bonding 3 or 4 diazo-naphtoquinone (DNQ) to a ballast group bonded with a benzene ring.
6. The photoresist composition according to claim 1 , wherein the solvent is a mixture solvent prepared by mixing 3-methoxy butyl acrylate, n-butyl acetate, and ethyl lactate in a weight ration of 30 to 70:15 to 40:15 to 50.
7. A semiconductor device comprising the photoresist composition of claim 1 as a mask in an N + ion doping process in a low Poly process.
8. A semiconductor device comprising the photoresist composition of claim 1 mask for the metal and nitride dry etch.
9. The photoresist composition according to claim 2 , wherein the novolak resin is a mixture of novolak A resin having a weight-average molecular weight of 3,000 to 15,000 and novolak B resin having a weight-average molecular weight of 5,000 to 15,000, or novolak B resin having a weight-average molecular weight of 5,000 to 15,000.
10. The photoresist composition according to claim 9 , wherein the mixture ratio of novolak A resin and novolak B resin is in a weight ratio of 1:1 to 9.
11. The photoresist composition according to claim 2 , wherein the photoactive compound is a compound of a type bonding 3 or 4 diazo-naphtoquinone (DNQ) to a ballast group bonded with a benzene ring.
12. A semiconductor device comprising the photoresist composition of claim 2 as a mask in an N + ion doping process in a low Poly process.
13. A semiconductor device comprising the photoresist composition of claim 2 as a mask for the metal and nitride dry etch.