Method for determining a correction value for light-emitting parts in exposure apparatus
View Patent ↗The invention is directed to the provision of an exposure apparatus that can determine a correction value for each individual light-emitting part by employing a method that detects the amount of light corresponding to one particular light-emitting part from composite light containing light rays from adjacent light-emitting parts, and also to the provision of a method for producing such an exposure apparatus. The production method according to the invention comprises the steps of lighting a plurality of light-emitting parts at the same time, detecting an output light-amount distribution across all of the plurality of light-emitting parts by making measurements using a line-like light-receiving device, detecting a peak position corresponding to each light-emitting part by using the output light-amount distribution; detecting the amount of light of each light-emitting part based on the peak position, and determining, based on the amount of light of each light-emitting part, the correction value for correcting nonuniformity in the amount of light of the light-emitting part.
1. A correction method for exposure apparatus including an exposure head having a plurality of light-emitting parts and a control means for controlling said exposure head, said method comprising the steps of:
lighting all of odd-numbered ones of said plurality of light-emitting parts at the same time;
lighting all of even-numbered ones of said plurality of light-emitting parts at the same time;
detecting a first output light-amount distribution occurring when all of the odd-numbered ones of said plurality of light-emitting parts are lighted at the same time, by making measurements using a line-like light-receiving device;
detecting a second output light-amount distribution occurring when all of the even-numbered ones of said plurality of light-emitting parts are lighted at the same time, by making measurements using a line-like light-receiving device;
detecting a first peak position by using said first output light-amount distribution;
detecting a second peak position by using said second output light-amount distribution;
combining said first peak position and said second peak position so as to make a combined peak position;
detecting the amount of light of each of said plurality of light-emitting parts based on said combined peak position; and
determining, based on the amount of light of said each light-emitting part, a correction value for correcting non-uniformity in the amount of light of said each light-emitting part.
2. The method according to claim 1 , wherein said step of determining the amount of light of said each light-emitting part includes the steps of:
obtaining a first value corresponding to each first peak position in said first output light-amount distribution;
obtaining a second value corresponding to each second peak position in said second output light-amount distribution: and determining the amount of light of said each light-emitting part on the basis of said first and second value.
3. The method according to claim 1 ,
wherein said step of determining the amount of light of said each light-emitting part includes the steps of:
providing a reference light-amount distribution;
obtaining a first sole light-amount distribution for said light-emitting part corresponding to said first peak position, by using said reference light-amount distribution and said first output light-amount distribution near said peak position;
obtaining a second sole light-amount distribution for said light-emitting part corresponding to said second peak position, by using said reference light-amount distribution and said second output light-amount distribution near said peak position; and
determining the amount of light of said light-emitting part based on said first and second sole light-amount distribution.
4. The method according to claim 1 , wherein said light-emitting parts each have an opening tilted at a prescribed angle in a direction in which said light-emitting parts are arranged.
5. The method according to claim 1 , wherein said control means has a memory, and wherein
said method further includes the step of storing said correction value for correcting non-uniformity in the amount of light of said each light-emitting part in said memory.
6. The method according to claim 1 , wherein said light-receiving device includes light-receiving parts, each having a width narrower than the width of each of said light-emitting parts.
7. The method according to claim 6 , wherein the number of light-receiving parts contained in said light-receiving device is equal to an integral multiple of the number of said plurality of light-emitting parts.
8. The method according to claim 7 , wherein said light-receiving parts are arranged in such a manner that three or more light-receiving parts correspond to one light-emitting part.
9. The method according to claim 6 , wherein a light-receiving surface formed by said plurality of light-receiving parts is longer than a light-emitting surface formed by said plurality of light-emitting parts.