Method for production of a mechanical resonator with a planar monolithic vibrating structure machined in a crystalline material and resonator produced thus
View Patent ↗The invention relates to the production of a mechanical resonator with a planar monolithic vibrating structure machine in a crystalline material. Where the material is trigonal (1), trigonal (2) or hexagonal in structure, said material is cut in the [001] plane or, where said material is cubic in structure, said material is cut in the [111] plane and the vibration mode of order 2 is used. Where the material is tetragonal (1) or tetragonal (2) or hexagonal said material is cut in the [001] plane or where said material is cubic in structure said material is cut in the [001], [100], or [010] plane and the vibration mode of order 3 is used. The resonator thus has a natural material frequency isotropy (Δf m =0).
1. A method for producing a mechanical resonator with a planar monolithic vibrating structure machined in a crystalline material, comprising the steps of:
when the crystalline material is chosen from crystalline materials of trigonal (1) or trigonal (2) structure, this material is cut in the [001] plane, and the 2nd-order vibration mode is then used,
when the crystalline material is chosen from crystalline materials of tetragonal (1) or tetragonal (2) structure, this material is cut in the [001] plane, and the 3rd-order vibration mode is then used,
when the crystalline material is chosen from crystalline materials of hexagonal structure, this material is cut in the [001] plane, and the 2nd-order or 3rd-order vibration mode is then used,
when the crystalline material is chosen from crystalline materials of cubic structure other than silicon, it is either a) cut in the [111] plane, and the 2nd-order vibration mode is then used, or b) cut in the [100] plane, and the 3rd-order vibration mode is then used, and
when the crystalline material is chosen from crystalline materials of cubic structure, it is cut in the [001] or [010] plane, and the 3rd-order vibration mode is then used,
whereby the resonator exhibits natural material-based frequency isotropy Δf m =0.
2. A mechanical resonator with a planar monolithic vibrating structure machined in a crystalline material,
wherein the resonator exhibits a material-based frequency isotropy Δf m =0, and
wherein the crystalline material is chosen from the following:
a) a crystalline material of tetragonal (1) or tetragonal (2) structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in the 3rd-order vibration mode;
b) a crystalline material of trigonal (1) or trigonal (2) structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in the 2nd-order vibration mode;
c) a crystalline material of hexagonal structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in both the 2nd- and 3rd-order vibration modes;
d) a crystalline material of cubic structure other than silicon,
i) cut in the [111] plane, the resonator then exhibiting material-based frequency isotropy in the 2nd-order vibration model, or
ii) cut in the [001], or [010] planes, the resonator then exhibiting material-based frequency isotropy in the 3rd-order vibration mode, and
e) a crystalline material of cubic structure cut in the [1001 ] plane, the resonator then exhibiting material-based frequency isotropy in the 3rd-order vibration mode.
3. A method for producing a mechanical resonator with a planar monolithic vibrating structure machined in a crystalline material, comprising the steps of:
when the crystalline material is chosen from crystalline materials of trigonal (1) or trigonal (2) structure, this material is cut in the [001] plane, and the 2nd-order vibration mode is then used,
when the crystalline material is chosen from crystalline materials of tetragonal (1) or tetragonal (2) structure, this material is cut in the [001] plane, and the 3rd-order vibration mode is then used,
when the crystalline material is chosen from crystalline materials of hexagonal structure, this material is cut in the [001] plane, and the 2nd-order or 3rd-order vibration mode is then used, and
when the crystalline material is chosen from crystalline materials of cubic structure, it is cut in the [001] or [010] plane, and the 3rd-order vibration mode is then used,
whereby the resonator exhibits natural material-based frequency isotropy Δf m =0.
4. A mechanical resonator with a planar monolithic vibrating structure machined in a crystalline material,
wherein the resonator exhibits a material-based frequency isotropy Δf m =0, and
wherein the crystalline material is chosen from the following:
a) a crystalline material of tetragonal (1) or tetragonal (2) structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in the 3rd-order vibration mode;
b) a crystalline material of trigonal (1) or trigonal (2) structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in the 2nd-order vibration mode;
c) a crystalline material of hexagonal structure cut in the [001] plane, the resonator then exhibiting material-based frequency isotropy in both the 2nd- and 3rd-order vibration modes; and
d) a crystalline material of cubic structure cut in the [100] plane, the resonator then exhibiting material-based frequency isotropy in the 3rd-order vibration mode.