Thin film translator array panel and a method for manufacturing the panel
View Patent ↗A gate wire including a gate line and a gate electrode is formed on a substrate and a gate insulating layer is formed on the substrate. A semiconductor pattern and an etching assistant pattern are formed on the gate insulating layer and a source/drain conductor pattern and an etching assistant layer are formed on the semiconductor pattern and the etching assistant pattern. A data wire including a data line and source and drain electrodes separated from each other is formed by removing the etching assistant layer and partly removing the source/drain conductor pattern. A pixel electrode connected to the drain electrodes is formed.
1. A thin film transistor array panel comprising:
an insulating substrate;
a gate wire formed on the substrate and including a plurality of gate lines and a plurality of gate electrodes connected to the gate lines;
a gate insulating layer formed on the gate line;
a semiconductor layer formed on the gate insulating layer;
a data wire formed on the semiconductor layer and including a plurality of data lines intersecting the gate lines, a plurality of source electrodes connected to the data lines, and a plurality of drain electrodes located opposite the source electrodes with respect to the gate electrodes;
a plurality of pixel electrodes connected to the drain electrodes; and
an etching assistant pattern made of the same layer as the semiconductor layer and located out of an area enclosed by the gate lines and the data lines.
2. The thin film transistor array panel of claim 1 , wherein the data wire comprises a lower film of Cr, Mo or Mo ally and an upper film of Al or Al ally.
3. The thin film transistor array panel of claim 2 , further comprising a passivation layer disposed between the data wire and the pixel electrode.
4. The thin film transistor array panel of claim 3 , wherein the semiconductor layer has substantially the same planar shape as the data wire except for a channel portion located between the data line and the drain electrode.
5. The thin film transistor array panel of claim 1 , wherein the etching assistant pattern is located outside of a pixel area.
6. The thin film transistor array panel of claim 1 , wherein the etching assistant pattern is formed directly on the gate insulating layer.
7. The thin film transistor array panel of claim 1 , wherein the thickness of the etching assistant pattern is thinner than a thickness of the semiconductor layer.