Resist composition and method of forming resist pattern using same
There are provided a resist composition that produces a resist pattern of good shape, and a method of forming a resist pattern that uses such a resist composition. The resist composition comprises a resin component (A) that undergoes a change in alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), wherein the component (B) comprises a compound represented by a general formula (I) shown below [wherein, R 1 to R 3 each represent, independently, a methyl group or an ethyl group; and X − represents an anion].
1 . A resist composition comprising a resin component (A) that undergoes a change in alkali solubility under action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), wherein
said component (B) is a compound represented by a general formula (I) shown below:
[wherein, R 1 to R 3 each represent, independently, a methyl group or an ethyl group; and X − represents an anion].
2 . A resist composition according to claim 1 , wherein said component (B) is a compound in which said anion X − is a substituted or unsubstituted aliphatic alkylsulfonate ion or arylsulfonate ion.
3 . A resist composition according to claim 2 , wherein said component (B) is a compound in which said aliphatic alkylsulfonate ion is a fluoroalkylsulfonate ion in which either a portion of, or all hydrogen atoms of an aliphatic alkyl group have been fluorinated or said arylsulfonate ion is a fluoroarylsulfonate ion in which either a portion of, or all hydrogen atoms of an aryl group have been fluorinated.
4 . A resist composition according to claim 3 , wherein said component (B) is a compound represented by a general formula (II) shown below:
[wherein, Y − represents a trifluoromethanesulfonate ion, a nonafluorobutanesulfonate ion, or a perfluorooctylsulfonate ion].
5 . A resist composition according to claim 1 , wherein said component (A) comprises a resin containing a structural unit derived from a (meth)acrylate ester.
6 . A resist composition according to claim 1 , wherein said component (A) comprises a resin containing a structural unit (a1) derived from a (meth)acrylate ester containing an acid dissociable, dissolution inhibiting group.
7 . A resist composition according to claim 6 , wherein said component (A) comprises a resin that further contains a structural unit (a2) derived from a (meth)acrylate ester containing a lactone unit.
8 . A resist composition according to claim 6 , wherein said component (A) comprises a resin that further contains a structural unit (a3) derived from a (meth)acrylate ester containing a hydroxyl group.
9 . A resist composition according to claim 6 , wherein said structural unit (a1) is a structural unit derived from a 2-(1-adamantyl)-2-alkyl(meth)acrylate.
10 . A resist composition according to claim 7 , wherein said structural unit (a2) is a structural unit derived from a norbornanelactone group containing (meth)acrylate.
11 . A resist composition according to claim 8 , wherein said structural unit (a3) is a structural unit derived from 3-hydroxy-1-adamantyl(meth)acrylate.
12 . A resist composition according to claim 1 , wherein said component (C) is a mixed solvent of propylene glycol monomethyl ether acetate and a polar solvent.
13 . A resist composition according to claim 12 , wherein said polar solvent is ethyl lactate.
14 . A resist composition according to claim 1 , further comprising a secondary or tertiary lower aliphatic amine component (D).
15 . A method of forming a resist pattern comprising the steps of applying a resist composition according to claim 1 to a substrate, conducting a prebake, performing selective exposure, conducting subsequent PEB (post exposure baking), and then performing alkali developing to form a resist pattern.