Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions
View Patent ↗The invention includes coil constructions configured for utilization in PVD chambers, and also includes methods of forming coil constructions suitable for utilization in PVD chambers. The coil constructions can include one or more cup projections extending from an outer periphery of a coil body. The cup projections are one-piece with the coil body, and have a recess extending therein with a projecting lip extending entirely around the recess. The cup projections further comprise a fastener receiver within the recess configured to receive a fastener for connecting the coil with the chamber. The methods of forming the coil construction can include identifying separate components of an assembly associated with a coil replacement kit, and forming a one-piece construction which can be substituted for at least two of the components.
1. A coil construction configured for utilization in a physical vapor deposition chamber, comprising:
a one-piece body having at least one cup projection extending from an annular coil, said cup projection having a recess extending therein, and
the one-piece body including a projecting lip of the cup projection which extends entirely around the recess; and the body defining a fastener receiver within the recess and configured to receive a fastener for connecting the annular coil with the chamber, wherein the annular coil, the cup projection and the projecting lip of the cup projection are part of the one-piece body construction.
2. The coil construction of claim 1 wherein the cup projection has a surface at the bottom of the recess, and wherein the fastener receiver is an opening extending through the surface and configured to receive the fastener for connecting the annular coil with the chamber.
3. The coil construction of claim 1 wherein the one-piece body comprises three of the cup projections extending from the annular coil.
4. The coil construction of claim 1 wherein the one-piece body comprises a step-in-and-step-out slit configuration and a pair of clamp constructions on opposing sides of the slit.
5. The coil construction of claim 1 wherein the one-piece body comprises a side-by-side slit configuration and a pair of clamp constructions on opposing sides of the slit.
6. The coil construction of claim 1 wherein the one-piece body comprises a material containing one or more of aluminum, cadmium, cobalt, copper, gold, indium, molybdenum, nickel, niobium, palladium, platinum, rhenium, ruthenium, silver, tin, tantalum, titanium, tungsten, vanadium and zinc in any of elemental, compound or alloy form.
7. The coil construction of claim 1 wherein the one-piece body is copper having a purity of at least 99%, by weight.
8. The coil construction of claim 1 wherein the one-piece body is copper having a purity of at least 99.99%, by weight.
9. The coil construction of claim 1 wherein the one-piece body is titanium having a purity of at least 99%, by weight.
10. The coil construction of claim 1 wherein the one-piece body is zirconium having a purity of at least 99%, by weight.
11. The coil construction of claim 1 wherein the one-piece body is tungsten having a purity of at least 99%, by weight.
12. The coil construction of claim 1 wherein the one-piece body is tantalum having a purity of at least 99%, by weight.
13. The coil construction of claim 1 wherein the one-piece body comprises iron.
14. The coil construction of claim 1 wherein the annular coil is substantially circular.
15. A method of forming a coil construction suitable for utilization in a physical vapor deposition chamber, comprising:
providing a material; and
shaping the material into a single piece comprising:
an annular coil; at least one cup projection extending outwardly from the annular coil; the cup projection having a recess extending therein;
a projecting lip of the cup projection, the projecting lip extending entirely around the recess, wherein the annular coil, the cup projection and the projecting lip of the cup projection are part of the one-piece body construction; and
a fastener receiver within the cup projection and configured to receive a fastener for connecting the annular coil with the chamber.
16. The method of claim 15 wherein the material is a block, and wherein the shaping comprises removing at least an approximation of said single piece from the block.
17. The method of claim 15 wherein the material is a plate, and wherein the shaping comprises forging at least an approximation of said single piece from the plate.
18. The method of claim 15 wherein the material is a powder, and wherein the shaping comprises pressing the powder into at least an approximation of said single piece.
19. The method of claim 15 wherein the material is a molten liquid, and wherein the shaping comprises pouring the liquid into a mold to cast the material into at least an approximation of said single piece.
20. The method of claim 15 wherein the material comprises one or more of copper, titanium, zirconium, tungsten, tantalum and iron.
21. The method of claim 15 wherein the material comprises at least 99% copper, by weight.
22. The method of claim 15 wherein the material comprises at least 99% titanium, by weight.
23. The method of claim 15 wherein the material comprises at least 99% zirconium, by weight.
24. The method of claim 15 wherein the material comprises at least 99% tungsten, by weight.
25. The method of claim 15 wherein the material comprises at least 99% tantalum, by weight.
26. The method of claim 15 wherein the material comprises iron.
27. The method of claim 15 wherein the annular coil is substantially circular.