Resist polymer and resist composition
View Patent ↗The resist polymer of the present invention comprises a specific constitutional unit having a cyano group, a constitutional unit having an acid-dissociable group, and a specific constitutional unit having a lactone skeleton. When the above polymer is used as a resist resin in DUV excimer laser lithography or electron beam lithography, it exhibits high sensitivity and high resolution, and provides a good resist pattern shape, having a small degree of occurrence of line edge roughness or generation of microgels.
1. A resist polymer, which comprises a constitutional unit represented by formula (1-1) indicated below, a constitutional unit having an acid-dissociable group, and a constitutional unit having a lactone skeleton that is represented by at least one selected from the group consisting of formulas (4-1), (4-2), (4-3), (4-5), (4-6), and (4-10) indicated below:
wherein, in formula (1-1), R 01 represents a hydrogen atom or a methyl group; R 03 represents a hydrogen atom or a linear or branched alkyl group having 1 to 6 carbon atoms; and each of A 01 and A 02 independently represents a hydrogen atom, or a linear or branched alkyl group having 1 to 4 carbon atoms, or A 01 and A 02 together represent —O—, —S—, —NH—, or an alkylene chain having 1 to 6 carbon atoms,
wherein, in formula (4-1), R 41 represents a hydrogen atom or a methyl group; each of R 401 and R 402 independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a hydroxy group, a carboxy group, or a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or R 401 and R 402 together represent —O—, —S—, —NH—, or a —(CH 2 ) j — chain wherein j represents an integer between 1 and 6; i represents 0 or 1; X 5 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, a cyano group, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n5 represents an integer between 0 and 4, and m represents 1 or 2, provided that when n5 is 2 or greater, X 5 may be a plurality of different groups,
wherein, in formula (4-2), R 42 represents a hydrogen atom or a methyl group; each of R 201 and R 202 independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a hydroxy group, a carboxy group, or a carboxy group esterified with alcohol having 1 to 6 carbon atoms; A 1 and A 2 together represent —O—, —S—, —NH—, a —(CH 2 ) k — chain wherein k represents an integer between 1 and 6; X 6 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, a cyano group, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n6 represents an integer between 0 and 4, provided that when n6 is 2 or greater, X 6 may be a plurality of different groups,
wherein, in formula (4-3), R 43 represents a hydrogen atom or a methyl group; each of R 203 and R 204 independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a hydroxy group, a carboxy group, or a carboxy group esterified with alcohol having 1 to 6 carbon atoms; each of A 3 and A 4 independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a hydroxy group, a carboxy group, or a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or A 3 and A 4 together represent —O—, —S—, —NH—, or a —(CH 2 ) 1 — chain wherein 1 represents an integer between 1 and 6; X 7 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, a cyano group, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n7 represents an integer between 0 and 4, provided that when n7 is 2 or greater, X 7 may be a plurality of different groups,
wherein, in formula (4-5), R 45 represents a hydrogen atom or a methyl group; each of R 8 and R 9 independently represents a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms; each of R 52 , R 62 , and R 72 independently represents a hydrogen atom or a methyl group; each of Y 12 , Y 22 , and Y 32 independently represents —CH 2 — or —CO—O—, and at least one of them represents —CO—O—; X 9 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, a cyano group, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n9 represents an integer between 0 and 4, provided that when n9 is 2 or greater, X 9 may be a plurality of different groups,
wherein, in formula (4-6), R 46 represents a hydrogen atom or a methyl group; R 10 represents a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms; each of R 53 , R 63 , and R 73 independently represents a hydrogen atom or a methyl group; each of Y 13 , Y 23 , and Y 33 independently represents —CH 2 — or —CO—O—, and at least one of them represents —CO—O—; X 10 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, a cyano group, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n10 represents an integer between 0 and 4, provided that when n10 is 2 or greater, X 10 may be a plurality of different groups, and
wherein, in formula (4-10), each of R 91 , R 92 , R 93 , and R 94 independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a hydroxy group, a carboxy group, or a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or R 91 and R 92 together represent —O—, —S—, —NH—, or a —(CH 2 ) t — chain wherein t represents an integer between 1 and 6; and m1 represents 1 or 2.
2. The resist polymer according to claim 1 , which comprises at least one constitutional unit represented by said formula (1-1), at least one constitutional unit selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-7):
wherein, in formula (4-7), R 47 represents a hydrogen atom or a methyl group.
3. The resist polymer according to claim 2 , wherein the total ratio of at least one constitutional unit represented by said formula (1-1) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-7) is between 30% and 60% by mole.
4. The resist polymer according to claim 1 , which comprises at least one constitutional unit represented by said formula (1-1), at least one constitutional unit selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-8):
wherein, in formula (4-8), R 48 represents a hydrogen atom or a methyl group.
5. The resist polymer according to claim 4 , wherein the total ratio of at least one constitutional unit represented by said formula (1-1) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-8) is between 30% and 60% by mole.
6. The resist polymer according to claim 1 , which comprises at least one constitutional unit represented by said formula (1-1), at least one constitutional unit selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-11):
wherein, in formula (4-11), R 411 represents a hydrogen atom or a methyl group.
7. The resist polymer according to claim 6 , wherein the total ratio of at least one constitutional unit represented by said formula (1-1) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-11) is between 30% and 60% by mole.
8. The resist polymer according to claim 1 , which comprises at least one constitutional unit represented by said formula (1-1), at least one constitutional unit selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-9):
wherein, in formula (4-9), R 49 represents a hydrogen atom or a methyl group.
9. The resist polymer according to claim 8 , wherein the total ratio of at least one constitutional unit represented by said formula (1-1) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-9) is between 30% and 60% by mole.
10. The resist polymer according to claim 1 , which comprises at least one constitutional unit represented by said formula (1-1), at least one constitutional unit selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit selected from the group consisting of those represented by said formulas (4-2) and (4-3).
11. The resist polymer according to claim 10 , wherein the total ratio of at least one constitutional unit represented by said formula (1-1) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (4-2) and (4-3) is between 30% and 60% by mole.
12. A resist polymer, which comprises a constitutional unit represented by formula (2) indicated below:
wherein, in formula (2), R 01 represents a hydrogen atom or a methyl group, at least one constitutional unit having an acid-dissociable group selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-11):
wherein, in formula (4-11), R 411 represents a hydrogen atom or a methyl group.
13. The resist polymer according to claim 12 , wherein the total ratio of at least one constitutional unit represented by said formula (2) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-11) is between 30% and 60% by mole.
14. A resist polymer, which comprises a constitutional unit represented by formula (2) indicated below:
wherein, in formula (2), R 01 represents a hydrogen atom or a methyl group, at least one constitutional unit having an acid-dissociable group selected from the group consisting of those represented by formulas (3-1-1), (3-3-1), and (3-5) indicated below:
wherein, in formula (3-1-1), R 31 represents a hydrogen atom or a methyl group; R 1 represents an alkyl group having 1 to 3 carbon atoms; X 1 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n1 represents an integer between 0 and 4, and when n1 is 2 or greater, X 1 may be a plurality of different groups, and
wherein, in formula (3-3-1), R 33 represents a hydrogen atom or a methyl group; R 4 represents an alkyl group having 1 to 3 carbon atoms; X 3 represents a linear or branched alkyl group having 1 to 6 carbon atoms that may have, as a substituent, at least one selected from the group consisting of a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, and an amino group, a hydroxy group, a carboxy group, an acyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a carboxy group that is esterified with alcohol having 1 to 6 carbon atoms, or an amino group; and n3 represents an integer between 0 and 4, and q represents 0 or 1, provided that when n3 is 2 or greater, X 3 may be a plurality of different groups; and
wherein, in formula (3-5), R 35 represents a hydrogen atom or a methyl group, and at least one constitutional unit represented by the following formula (4-9):
wherein, in formula (4-9), R 49 represents a hydrogen atom or a methyl group.
15. The resist polymer according to claim 14 , wherein the total ratio of at least one constitutional unit represented by said formula (2) is between 5% and 30% by mole,
the total ratio of at least one constitutional unit selected from the group consisting of those represented by said formulas (3-1-1), (3-3-1), and (3-5) is between 30% and 60% by mole, and
the total ratio of the constitutional unit represented by said formula (4-9) is between 30% and 60% by mole.