Patent Application
Utility
PCT National Stage
App. No. 10/548,873
· Confirmation No. 2767
Cvd apparatus and method for cleaning cvd apparatus
Inventors:
Etsuo Wani, Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata, Kenji Kameda
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-11-04 | ABN |
Abandonment | 2 | View | |
| 2010-04-08 | CTFR |
Final Rejection | 2 | View | |
| 2010-04-08 | CTFR |
Final Rejection | 8 | View | |
| 2010-04-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-04-08 | FWCLM |
Index of Claims | 1 | View | |
| 2010-04-08 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2010-04-08 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2009-12-28 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2009-12-28 | CLM |
Claims | 3 | View | |
| 2009-12-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2009-12-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-12-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-12-28 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-12-28 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-12-28 | XT/ |
Extension of Time | 1 | View | |
| 2009-08-28 | CTNF |
Non-Final Rejection | 8 | View | |
| 2009-08-28 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-08-28 | FWCLM |
Index of Claims | 1 | View | |
| 2009-08-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-08-28 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2009-08-28 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2009-08-28 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-08-28 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2009-08-28 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-08-27 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-08-27 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-06-30 | ELC. |
Response to Election / Restriction Filed | 2 | View | |
| 2009-06-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-30 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-06-12 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-06-12 | STATUS.LET |
Request for status of Application | 1 | View | |
| 2009-06-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-12 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2009-06-05 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2009-06-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-06-05 | FOR |
Foreign Reference | 42 | View | |
| 2009-06-05 | FWCLM |
Index of Claims | 1 | View | |
| 2008-11-11 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-11-11 | FOR |
Foreign Reference | 2 | View | |
| 2008-11-11 | FOR |
Foreign Reference | 9 | View | |
| 2008-11-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2008-11-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-11-11 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-04-22 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-04-22 | PA.. |
Power of Attorney | 14 | View | |
| 2008-04-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2006-06-06 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2006-04-26 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2006-04-26 | OATH |
Oath or Declaration filed | 5 | View | |
| 2006-04-26 | ADS |
Application Data Sheet | 4 | View | |
| 2006-04-26 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2006-04-26 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2006-04-14 | M905 |
Notice of DO/EO Missing Requirements Mailed | 2 | View | |
| 2005-12-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2005-12-02 | FOR |
Foreign Reference | 8 | View | |
| 2005-12-02 | FOR |
Foreign Reference | 18 | View | |
| 2005-09-14 | TRNA |
Transmittal of New Application | 2 | View | |
| 2005-09-14 | SPEC |
Specification | 59 | View | |
| 2005-09-14 | CLM |
Claims | 10 | View | |
| 2005-09-14 | ABST |
Abstract | 1 | View | |
| 2005-09-14 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2005-09-14 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-09-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 1 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 2 | View | |
| 2005-09-14 | FOR |
Foreign Reference | 1 | View | |
| 2005-09-14 | FRPR |
Certified Copy of Foreign Priority Application | 52 | View | |
| 2005-09-14 | FRPR |
Certified Copy of Foreign Priority Application | 65 | View | |
| 2005-09-14 | ADS |
Application Data Sheet | 4 | View | |
| 2005-09-14 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2005-09-14 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2005-09-14 | 371P |
Documents submitted with 371 (National Stage) Applications | 67 | View | |
| 2005-09-14 | 371P |
Documents submitted with 371 (National Stage) Applications | 2 | View | |
| 2005-09-14 | 136A |
Authorization for Extension of Time all replies | 2 | View | |
| 2005-09-14 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2005-09-14 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-09-14 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Etsuo Wani
Tokyo, JAPAN
Katsuo Sakai
Tokyo, JAPAN
Seiji Okura
Tokyo, JAPAN
Masaji Sakamura
Tokyo, JAPAN
Kaoru Abe
Tokyo, JAPAN
Hitoshi Murata
Tokyo, JAPAN
Kenji Kameda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
427/248.1
H01J37/32862
C23C16/4405
H01J37/32082
Prosecution
- Examiner
- BURKHART, ELIZABETH A
- Art Unit
- 1715
- Customer No.
- 28289
- Docket No.
- 1217-080270
- Confirmation No.
- 2767
Foreign Priority
2003-070337
·
2003-03-14
·
JAPAN
2003-187141
·
2003-06-30
·
JAPAN
Publication
- Pub. No.
- US20060201533A1
- Pub. Date
- 2006-09-14
from
FUJITSU LIMITED
ASSIGNMENT OF ASSIGNOR'S ENTIRE RIGHT, TITLE AND INTEREST
Recorded 2010-03-05
CANON ANELVA CORPORATION,
SHOWA DENKO K.K.,
TOKYO ELECTRON LIMITED,
HITACHI KOKUSAI ELECTRIC INC.,
FUJITSU LIMITED,
MITSUBISHI ELECTRIC CORPORATION,
RENESAS TECHNOLOGY CORP.
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAMES PREVIOUSLY RECORDED ON REEL 020179 FRAME 0399. ASSIGNOR(S) HEREBY CONFIRMS THE ENTIRE INTEREST AND THE GOODWILL.
Recorded 2008-02-26
CANON ANELVA CORPORATION,
SHOWA DENKO KABUSHIKI KAISHA,
TOKYO ELECTRON LIMITED,
HITACHI KOKUSAI ELECTRIC, INC.,
FUJITSU LIMITED,
MITSUBISHI ELECTRIC CORPORATION,
RENESAS TECHNOLOGY CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-11-29
from
ABE, KAORU,
KAMEDA, KENJI,
MURATA, HITOSHI,
OKURA, SEIJI,
SAKAI, KATSUO,
SAKAMURA, MASAJI,
WANI, ETSUO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-04-26
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Quick Facts
- App. No.
- 10/548,873
- Filed
- 2006-04-26
- Effective Filing
- 2005-09-14
- Pub. No.
- US20060201533A1
- Examiner
- BURKHART, ELIZABETH A
- Art Unit
- 1715
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