Device for cleaning CVD device and method of cleaning CVD device
View Patent ↗An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO 2 or Si 3 N 4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming process, and a method for cleaning a CVD apparatus. A control monitors luminous intensity data of an F radical in a reaction chamber by optical emission spectroscopy and compares the data with calibrated prestored luminous intensity data, and ends cleaning after a predetermined time passes from reaching a luminous intensity saturation point. Furthermore, concentration data of SiF 4 in a gas discharged from the reaction chamber are monitored by a Fourier transform infrared spectrometry and compared with prestored concentration data of SiF 4 to decide that the predetermined time has passed when a predetermined cleaning end point concentration is reached, thereby ending the cleaning.
1. A method for cleaning a CVD apparatus comprising:
a reactive gas introducing device for applying a high frequency to a reactive gas supplied into a reaction chamber through a reactive gas supply path and changing the reactive gas into a plasma, and supplying the reactive gas thus changed into the plasma into the reaction chamber; and
a counter electrode stage provided in the reaction chamber and serving to mount a base material for forming a deposited film,
the deposited film being formed on a surface of the base material over the counter electrode stage with the reactive gas changed into the plasma introduced into the reaction chamber through the reactive gas introducing device, the method comprising:
introducing a cleaning gas into the reaction chamber;
forming a high frequency plasma by generating a high frequency electric field from the high frequency applying device provided in the reaction chamber;
detoxifying a by-product gasified by the cleaning gas and deposited in the reaction chamber and discharging the detoxified by-product to the outside of the reaction chamber by a harm removing device;
carrying out an optical emission spectral analysis of an F radical in the reaction chamber using at least an optical emission spectroscopy (OES) provided in the reaction chamber to measure a luminous intensity;
monitoring FLi + or F 2 Li + as an F intensity in the reaction chamber using an ion attachment type mass spectroscopy (IAMS);
monitoring the concentration of SiF 4 in the gas discharged from the reaction chamber by a Fourier transform infrared spectrometry (FTIR) provided on a gas discharging path for discharging the gas from the reaction chamber;
comparing monitored luminous intensity data, monitored F intensity data, and monitored concentration data of SiF 4 , with pre-stored luminous intensity data, pre-stored F intensity data, and pre-stored concentration data of SiF 4 , respectively;
stopping introducing the cleaning gas to end the cleaning at the earliest of
a passage of a predetermined time from the time when the monitored luminous intensity reaches a luminous intensity saturation point,
a passage of a predetermined time from the time when the monitored F intensity reaches an F intensity saturation point, and
a time when the monitored concentration data of SiF 4 reaches a predetermined cleaning endpoint concentration, wherein
the predetermined time is an arbitrary time between 15 seconds and 50 seconds, and
the predetermined cleaning endpoint concentration is 100 ppm.