Ultrasonic probe
View Patent ↗An ultrasonic probe according to the present invention includes: an ultrasonic element for transmitting and receiving an ultrasonic signal; a signal line for transmitting an electric signal to or from the ultrasonic element; and a ground line for supplying a ground potential to the ultrasonic element. The ultrasonic element is connected electrically with a sensor signal substrate and a sensor ground substrate. These substrates are connected electrically with the signal line and the ground line, respectively, via a cable substrate. The sensor ground substrate and the cable substrate are connected directly or via a relay ground substrate.
1. An ultrasonic probe, comprising: a piezoelectric element for transmitting and receiving an ultrasonic signal; a signal line for transmitting an electric signal to or from the piezoelectric element; and a ground line for supplying a ground potential to the piezoelectric element, the ultrasonic probe further comprising:
a sensor signal substrate and a sensor ground substrate connected electrically with the piezoelectric element; and
a cable substrate that electrically connects the sensor signal substrate and the sensor ground substrate with the signal line and the ground line, respectively,
wherein the sensor ground substrate and the cable substrate are connected directly or via a relay ground substrate as a conductive substrate, and
at least a part of the cable substrate is covered with the sensor ground substrate or the relay ground substrate.
2. The ultrasonic probe according to claim 1 , wherein at least a part of the sensor signal substrate is covered with the sensor ground substrate or the relay ground substrate.
3. The ultrasonic probe according to claim 1 , wherein a connecting portion between the sensor signal substrate and the cable substrate is covered with the sensor ground substrate or the relay ground substrate.
4. The ultrasonic probe according to claim 3 , wherein the connecting portion between the sensor signal substrate and the cable substrate is covered with the sensor ground substrate or the relay ground substrate entirely.
5. The ultrasonic probe according to claim 1 , wherein at least a part of the piezoelectric element is covered with the sensor ground substrate or the relay ground substrate.
6. The ultrasonic probe according to claim 5 , wherein an ultrasonic wave transmitting/receiving surface of the piezoelectric element is covered with the sensor ground substrate or the relay ground substrate.
7. The ultrasonic probe according to claim 6 , wherein the ultrasonic wave transmitting/receiving surface and peripheral surfaces of the piezoelectric element are covered with the sensor ground substrate or the relay ground substrate.
8. ultrasonic probe according to claim 6 , wherein a plurality of grooves are formed on a part of the sensor ground substrate or the relay ground substrate that covers the ultrasonic wave transmitting/receiving surface of the piezoelectric element, the grooves dividing the piezoelectric element electrically into a plurality of oscillators.
9. The ultrasonic probe according to claim 6 ,
wherein the sensor ground substrate is arranged so as to surround a periphery of the piezoelectric element, the sensor signal substrate, and the cable substrate, and
a portion of the sensor ground substrate that is drawn over a surface of the piezoelectric element other than a surface connected with the sensor signal substrate is connected with the cable substrate or a part of the sensor ground substrate.