Process for fabricating micromachine
View Patent ↗A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine ( 1 ) including an oscillator ( 4 ), a step of forming a sacrifice layer around a movable portion of the oscillator ( 4 ); a step of covering a sacrifice layer with an overcoat film ( 8 ), followed by the formation of a penetrating hole ( 10 ) reaching the sacrifice layer in the overcoat layer ( 8 ); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole ( 10 ) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole ( 10 ).
1. A method for manufacturing a micromachine, comprising the steps of:
providing a substrate;
forming an insulating layer on the substrate;
forming a lower wire on the insulating layer;
forming a first sacrifice layer comprising silicon dioxide on a top surface of the lower wire;
forming an oscillator on a portion of the first sacrifice layer;
forming a second sacrifice layer on top and side surfaces of the oscillator so that a movable portion of the oscillator is covered with the second sacrifice layer, the second sacrifice layer comprising silicon dioxide, and in cross-section, the movable portion of the oscillator is surrounded by the first and second sacrifice layers;
covering exposed portions of the first and second sacrifice layers with an overcoat film;
forming first and second penetrating holes in the overcoat film respectively on both sides of the oscillator, the first and second penetrating holes extending through the overcoat film to reach the first sacrificial layer on the both sides of the oscillator,
performing sacrifice-layer etching using the first and second penetrating holes to remove the first and second sacrifice layers so as to form a space around the movable portion of the oscillator; and
following the sacrifice-layer etching, performing a film-formation treatment by sputtering at a reduced pressure so as to form a sputtering layer that seals the first and second penetrating holes and that is formed into at least one upper wire over the overcoat film,
wherein,
the sputtering layer is composed of one selected from the group consisting of an aluminum copper film and an aluminum silicon film.
2. The method for manufacturing a micromachine, according to claim 1 , wherein the method is applied to a micromachine having means for driving oscillation in the oscillator.
3. The method for manufacturing a micromachine, according to claim 2 , wherein static electricity is used as the means for driving oscillation.
4. The method for manufacturing a micromachine, according to claim 2 , wherein piezoelectricity is used as the means for driving oscillation.