Component with a piezoelectric functional layer
View Patent ↗An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.
1. An electrical component comprising:
a substrate;
a first electrode layer;
a growth layer that is structured and that is thinner than the first electrode layer;
a piezoelectric layer; and
a second electrode layer,
wherein the growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer.
2. An electrical component comprising:
a substrate;
a first electrode layer;
a growth layer that is structured and that is thinner than the first electrode layer;
a piezoelectric layer; and
a second electrode layer,
wherein the piezoelectric layer (i) substantially covers the growth layer and (ii) overlaps the growth layer along a perimeter of the growth layer, thereby causing the piezoelectric layer and the first electrode layer to substantially enclose the growth layer.
3. The electrical component of claim 1 , wherein the first electrode layer comprises multiple layers, the multiple layers comprising a titanium layer and another layer that is not titanium.
4. An electrical component comprising:
a substrate;
a first electrode layer;
a growth layer that is structured and that is thinner than the first electrode layer;
a piezoelectric layer;
a second electrode layer; and
an acoustic mirror between the substrate and the first electrode layer.
5. The electrical component of claim 4 , wherein the growth layer supports ordered growth relative to the piezoelectric layer.
6. The electrical component of claim 4 , wherein the growth layer comprises at least one of the following: Au, Mo, W, Pt, Si 3 N 4 , sapphire, spinel, Si, Ba 3 TiO 3 , ZrO 2 , MgO, and TiO 2 .
7. The electrical component of claim 4 , wherein the piezoelectric layer comprises at least one of AlN and ZnO.
8. An electrical component comprising:
a substrate;
a first electrode layer;
a growth layer that is structured and that is thinner than the first electrode layer;
a piezoelectric layer;
a second electrode layer;
a multilayer structure comprising a plurality of piezoelectric layers; and
an additional electrode layer and an additional growth layer between pairs of the plurality of piezoelectric layers.
9. A piezoelectric actuator comprising the electrical component of claim 8 .
10. A bulk acoustic wave resonator comprising:
the electrical component of claim 4 .
11. The electrical component of claim 1 , wherein the piezoelectric layer (i) substantially covers the growth layer and (ii) overlaps the growth layer along a perimeter of the growth layer, thereby causing the piezoelectric layer and the first electrode layer to substantially enclose the growth layer.
12. The electrical component of claim 1 , wherein the growth layer supports ordered growth relative to the piezoelectric layer.
13. The electrical component of claim 1 , wherein the growth layer comprises at least one of the following: Au, Mo, W, Pt, Si 3 N 4 , sapphire, spinel, Si, Ba 3 TiO 3 , ZrO 2 , MgO, and TiO 2 .
14. The electrical component of claim 1 , wherein the piezoelectric layer comprises at least one of AIN and ZnO.
15. The electrical component of claim 1 , wherein the first electrode layer comprises multiple layers, the multiple layers comprising a titanium layer and another layer that is not titanium.
16. The electrical component of claim 4 , wherein the first electrode layer comprises multiple layers, the multiple layers comprising a titanium layer and another layer that is not titanium.