IP Library Granted Patent US 7,468,503
Granted Patent B2
US 7,468,503 · App. 10/555,144 · Granted Dec 23, 2008

Pin photodetector with mini-mesa contact layer

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,468,503
App. No.
10/555,144
Granted
Dec 23, 2008
Kind
B2
Abstract

A PIN photodetector includes a first semiconductor contact layer, a semiconductor absorption layer having a larger area than the first semiconductor contact layer, a semiconductor passivation layer positioned between the first semiconductor contact layer and absorption layer, and a second semiconductor contact layer. The semiconductor absorption layer and passivation layers are positioned between the first and second semiconductor contact layers.

Claims (38)

1. A PIN photodetector comprising:

a first semiconductor contact layer;

a semiconductor absorption layer, the first semiconductor contact layer having a smaller area than the semiconductor absorption layer;

a semiconductor passivation layer positioned between the first semiconductor contact layer and the semiconductor absorption layer;

a second semiconductor contact layer, the semiconductor absorption layer and passivation layer being positioned between the first and second semiconductor contact layers;

a first bandgap grading layer positioned between the semiconductor passivation layer and the semiconductor absorption layer and a second bandgap grading layer positioned between the semiconductor absorption layer and the second semiconductor contact layer; and

wherein the second bandgap grading layer is directly adjacent to the second semiconductor contact layer.

2. The photodetector of claim 1 wherein the semiconductor absorption layer is InGaAs.

3. The photodetector of claim 1 wherein the passivation layer is InAlAs.

4. The photodetector of claim 1 wherein the wherein the first semiconductor contact layer is a p-type and the second semiconductor contact layer is an n-type.

5. The photodetector of claim 1 wherein the wherein the first semiconductor contact layer is an n-type and the second semiconductor contact layer is a p-type.

6. The photodetector of claim 5 wherein the first and second semiconductor contact layers are InAlAs.

7. The photodetector of claim 1 further comprising a second semiconductor passivation layer positioned about the first semiconductor passivation layer and the semiconductor absorption layer.

8. The photodetector of claim 1 further comprising a first metal contact positioned adjacent to the first semiconductor contact layer and at least one second metal contact positioned adjacent to the second semiconductor contact layer.

9. The photodetector of claim 8 wherein the first metal contact is a p-type and the second metal contact is an n-type.

10. The photodetector of claim 8 wherein the first metal contact is an n-type and the second metal contact is a p-type.

11. The photodetector of claim 1 wherein the electric field near the center of the semiconductor absorption layer is greater than the electric field near the edges of the semiconductor absorption layer.

12. The photodetector of claim 1 wherein the capacitance of the photodiode is determined by the area of the first semiconductor contact layer.

13. The photodetector of claim 1 wherein the photodiode has a dark current behavior that is substantially constant relative to an initial value.

14. The photodetector of claim 13 wherein the photodiode has a dark current behavior that is substantially constant relative to an initial value over a time period greater than 2000 hours.

15. The photodetector of claim 1 wherein the photodiode has a lifetime that exceeds twenty years.

16. The photodetector of claim 1 , where other semiconductors such as InP or other binary or tertiary III-V semiconductors are used.

17. The photodetector of claim 1 wherein the second bandgap grading layer further comprises a graded p+ layer.

18. A method of fabricating a PIN photodetector comprising:

providing a lower semiconductor contact layer;

depositing a semiconductor absorption layer;

depositing a semiconductor passivation layer;

depositing or fabricating an upper semiconductor contact layer having a smaller area than the semiconductor absorption layer;

depositing a first bandgap grading layer between the lower semiconductor contact layer and the semiconductor absorption layer and depositing a second bandgap grading layer between the semiconductor absorption layer and the semiconductor passivation layer; and

wherein the first bandgap grading layer is directly adjacent to the lower semiconductor contact layer.

19. The method of claim 18 wherein the semiconductor absorption layer is InGaAs.

20. The method of claim 18 wherein the passivation layer is InAlAs.

21. The method of claim 18 wherein the wherein the lower semiconductor contact layer is an n-type and the upper semiconductor contact layer is a p-type.

22. The method of claim 18 wherein the wherein the lower semiconductor contact layer is a p-type and the upper semiconductor contact layer is an n-type.

23. The method of claim 22 wherein both semiconductor contact layers are InAlAs.

24. The method of claim 18 further comprising depositing a second semiconductor passivation layer about the first semiconductor passivation layer and the semiconductor absorption layer.

25. The method of claim 18 using other semiconductors such as InP or other binary or tertiary III-V semiconductors.

26. The method of claim 18 wherein the first bandgap grading layer further comprises a graded p+ layer.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2018
From: ADVANCED PHOTONIX, INC.; PICOMETRIX, LLC
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 044649/0376 →
RELEASE OF SECURITY INTEREST Recorded Aug 4, 2017
From: PARTNERS FOR GROWTH III, L.P.
To: ADVANCED PHOTONIX, INC.; PICOMETRIX, LLC
Reel/Frame 043197/0862 →
SECURITY AGREEMENT Recorded May 19, 2015
From: ADVANCED PHOTONIX, INC.; PICOMETRIX, LLC
To: SILICON VALLEY BANK
Reel/Frame 035719/0460 →
SECURITY INTEREST Recorded Mar 12, 2014
From: PICOMETRIX, LLC
To: SILICON VALLEY BANK
Reel/Frame 032420/0795 →
SECURITY AGREEMENT Recorded Feb 12, 2013
From: PICOMETRIX, LLC
To: PARTNERS FOR GROWTH III, L.P.
Reel/Frame 029800/0507 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2006
From: KO, CHENG C.; LEVINE, BARRY
To: PICOMETRIX, LLC
Reel/Frame 017541/0516 →