Method for manufacturing liquid crystal display device
View Patent ↗A semiconductor film is formed in a gap between a source electrode and a drain electrode of a thin film transistor in an active-matrix type liquid crystal display device. A metal film for a gate electrode is formed on said semiconductor film via a gate insulating film. A photo-resist film, having a thick portion in region including the gap and having an opening portion in contact-hole forming region, is formed on the metal film. A contact-hole is formed in the gate insulating film by using the organic material film as a mask. The organic material film is left on the region including the gap. A gate electrode is formed on the region including the gap by etching the first metal film by using the remained organic material film as a mask. An organic material film, having projections and depressions, is formed on a reflective region except the contact-hole forming region. A reflective electrode is formed on the organic material film having projections and depressions
1. A method for manufacturing a liquid crystal display device, comprising the steps of:
forming a semiconductor film in a gap between a source electrode and a drain electrode of a thin film transistor in an active-matrix type liquid crystal display device, and forming a first metal film for a gate electrode on the semiconductor film via a gate insulating film;
forming a first organic material film on the first metal film, the first organic material film having a thick portion in a region including the gap and an opening portion in a contact-hole forming region;
forming a contact-hole in the gate insulating film by using the first organic material film as a mask, while leaving the first organic material film in the region including the gap;
forming the gate electrode on the region including the gap by etching the first metal film by using the first organic material film left as a mask; and
forming a second organic material film having projections and depressions in a reflective region except the contact-hole forming region, and forming a reflective electrode on the second organic material film having the projections and depressions.
2. The method as claimed in 1 , wherein the source electrode is comprised of a transparent electrode and a second metal film formed on the transparent electrode, and the first metal film and the second metal film are both etched when the first metal film is left on the region including the gap.
3. The method as claimed in claim 1 , wherein the first organic material film is formed by using a mask having a shield portion, a half-transparent portion and a transparent portion such that the shield portion is arranged in the region including the gap and the transparent portion is arranged in the contact-hole forming region, performing exposures on an organic material film, and developing the organic material film exposed.
4. The method as claimed in claim 3 , wherein the mask is a halftone mask or a diffraction mask.
5. The method as claimed in claim 1 , wherein the first metal film in the contact-hole forming region is etched by using the first organic material film as a mask, and then the contact-hole is formed in the gate insulating film by using the first metal film as a mask.