III-nitride compound semiconductor light emitting device
View Patent ↗The present invention relates to a III-nitride semiconductor light-emitting device having high external quantum efficiency, provides a III-nitride compound semiconductor light-emitting device including an active layer generating light by recombination of electrons and holes and containing gallium and nitrogen, an n-type Al(x)ln(y)Ga(1-x-y)N layer epitaxially grown before the active layer is grown, and an n-type electrode electrically contacting with the n-type Al(x)ln(y)Ga(1-x-y)N layer, in which the n-type Al(x)ln(y)Ga(1-x-y)N layer has a surface which is exposed by etching and includes a region for scribing and breaking the device and a region for contact with the n-type electrode, and the surface of the region for scribing and breaking the device is roughened, thereby it is possible to increase external quantum efficiency of the light-emitting device.
1. A III-nitride compound semiconductor light-emitting device comprising:
a plurality of III-nitride compound semiconductor layers that are epitaxially grown using a substrate, the plurality of III-nitride compound semiconductor layers including:
an active layer generating light by recombination of electrons and holes and containing gallium and nitrogen,
an n-type Al(x)ln(y)Ga(1-x-y)N layer epitaxially grown before the active layer is grown, and
an n-type electrode electrically contacting with the n-type Al(x)ln(y)Ga(1-x-y)N layer, and
wherein the n-type Al(x)ln(y)Ga(1-x-y)N layer has a top surface which is exposed by etching, the exposed top surface includes a region for scribing and breaking the device and a region for contact with the n-type electrode, and a top surface of the region for scribing and breaking the device including a roughened surface such that light generated from the active layer escapes outwardly from the device through said roughened surface.
2. The III-nitride compound semiconductor light-emitting device of claim 1 , wherein the roughened top surface of the region for scribing and breaking the device is formed by dry etching.
3. The III-nitride compound semiconductor light-emitting device of claim 2 , wherein a mask pattern is used in the dry etching.
4. The III-nitride compound semiconductor light-emitting device of claim 3 , wherein surface gratings are formed by means of the mask pattern, the surface area of each of the surface gratings is in a range of 1.5 μm 2 to 4 μm 2 .
5. The III-nitride compound semiconductor light-emitting device of claim 3 , wherein surface gratings are formed by means of the mask pattern, the height of each of the surface gratings is in a range of 0.5 μm to 1.5 μm.
6. The III-nitride compound semiconductor light-emitting device of claim 3 , wherein etching residues are used as the mask pattern in the dry etching.
7. The III-nitride compound semiconductor light-emitting device of claim 6 , wherein protrusions are formed by mean of the mask pattern and each of the protrusions has a conical shape.
8. The III-nitride compound semiconductor light-emitting device of claim 7 , wherein the diameter of the bottom of the conical shape is in the range of 1 nm to 10 μm.
9. The III-nitride compound semiconductor light-emitting device of claim 7 , wherein the height of the conical shape is in the range of 1 nm to 10 μm.
10. The III-nitride compound semiconductor light-emitting device of claim 1 , wherein the roughened top surface of the region for scribing and breaking the device is formed by wet etching.
11. The III-nitride compound semiconductor light-emitting device of claim 10 , wherein the wet etching is a photoelectrochemical etching.
12. The III-nitride compound semiconductor light-emitting device of claim 11 , wherein KOH solution is used as an etching solution in the photoelectrochemical etching.
13. The III-nitride compound semiconductor light-emitting device of claim 3 , wherein the dry etching is performed after the region for contact with the n-type electrode is etched.