Polymer dispersed liquid crystal formulations for modulator fabrication
View Patent ↗Embodiments of polymer dispersed liquid crystals (PDLCs) in accordance with the present invention comprise TL-series liquid crystal materials and a polymer matrix comprising polyacrylate resins having hydroxyl groups. These hydroxyl groups allow crosslinking by using isocyanate, improving mechanical properties and heat resistance. Typical ratios of liquid crystal to polymer range between about 50/50 to 70/30 (wt/wt). The PDLC materials exhibit enhanced sensitivity to driving voltages and higher transmission˜voltage (T-V) curve slope. In testing thin film transistors (TFTs), these PDLC materials can be used to compensate for an increased air gap accommodating flatness variation in the TFT substrate, and to reduce electrostatic forces between modulator and panel. Embodiments of PDLC materials in accordance with the present invention form solid films upon evaporation of the solvent. Homogeneity of embodiments of solvent-based PDLC formulations in accordance with the present invention allow for the use of many different coating methods, such as spin, doctor blade, and slot-die coatings.
1. A method of detecting defective operation of an electro-optical device, the method comprising:
disposing a polymer dispersed liquid crystal (PDLC) overlying and separated from an underlying electro-optical device by an air gap, the PDLC having a polymer matrix formed by the cross-linking of a polyacrylate resin and a polyisocyanate resin, and having a liquid crystal exhibiting a minimum bulk resistivity of 1×10 12 ohm·cm and a voltage holding ratio (VHR) of 98% or greater;
applying a voltage to a transparent electrode overlying the PDLC while illuminating the PDLC; and
detecting a changed intensity of light transmitted by the PDLC.
2. The method of claim 1 wherein the PDLC is disposed over a glass substrate bearing a thin film transistor.
3. The method of claim 1 wherein the changed intensity of light is detected by reflection of the incident light by a mirror.
4. The method of claim 1 wherein the PDLC comprises a ratio of liquid crystal to polymer of between about 50/50 and 70/30 (wt/wt).
5. The method of claim 1 wherein the applied voltage is between about 100-320 V across an air gap of at least 5 μm.
6. The method of claim 1 wherein the polyacrylate resin is selected from the group consisting of Paraloid AU1033 available from Rohm and Haas, and Doresco TA45-8or Doresco TA65-1 available from Dock Resins.
7. The method of claim 1 wherein the polyisocyanate resin comprises an aliphatic polyisocyanate such as Desmodur N-75 from Bayer Polymers.
8. The method of claim 1 wherein the liquid crystal is selected from the TL series available from EM Industries.
9. An apparatus for inspecting a semiconductor device, the apparatus comprising:
a support for a semiconductor device;
an electro-optic modulator separated from the support by an air gap, the electro-optic modulator comprising,
a mirror disposed proximate to the support,
a transparent electrode distal from the support, and
a polymer dispersed liquid crystal (PDLC) sensor material disposed between the transparent electrode and the mirror, the PDLC having a polymer matrix formed by the cross-linking of a polyacrylate resin and a polyisocyanate resin, and a liquid crystal exhibiting a minimum bulk resistivity of 1×10 12 ohm·cm and a voltage holding ratio (VHR) of 98% or greater;
a light source configured to illuminate the PDLC material during application of a voltage to the transparent electrode; and
a detector configured to detect intensity of light reflected by the mirror.
10. The apparatus of claim 9 wherein the support comprises a support for a workpiece bearing a thin film transistor.
11. The apparatus of claim 9 wherein the air gap has a width of between about 5-30 μm, and a voltage of about 100-320 V is configured to be applied to the transparent electrode.
12. The apparatus of claim 9 wherein the liquid crystal is selected from the TL series available from EM Industries.