Electron beam recording apparatus

1. An apparatus comprising:

a rotational drive unit for rotationally driving a disk substrate having a resist layer;

an electron beam irradiation unit;

a shift drive unit for shifting the irradiation position of the electron beam in a radial direction of said disk substrate;

a first control unit for acquiring a rotational angle of said disk substrate from said rotational drive unit;

a second control unit for acquiring a shift position from said shift drive unit; and

a third control unit for forming a latent image corresponding to a predetermined pattern in said resist layer by controlling the irradiation position caused by said electron beam irradiation unit on said resist layer in accordance with said rotational angle of said disk substrate, said shift position and said predetermined pattern;

wherein said electron beam irradiation unit includes a beam-adjusting system for adjusting the irradiation of said electron beam in such a manner as to spread over a plurality of tracks in the direction of traversing the tracks on said resist layer in response to the irradiation position control by said third control unit.

2. The electron beam recording apparatus according to claim 1 , wherein said beam-adjusting system is a high-speed deflector for deflecting said electron beam at a high speed in the radial direction of said disk substrate.

3. The electron beam recording apparatus according to claim 1 , wherein said beam adjusting system includes an aperture plate provided with a one-track aperture and a plural-track aperture which is expanded by at least a two-track length in the radial direction of said disk substrate and a deflecting system for deflecting said electron beam so as to selectively pass through an aperture plate.

4. The electron beam recording apparatus according to claim 3 , wherein said deflecting system is a blanking plate.

5. The electron beam recording apparatus according to claim 3 , wherein said deflecting system is a high-speed deflector arranged between a blanking plate and said aperture plate.

6. The electron beam recording apparatus according to claim 1 , wherein when the irradiation position of said electron beam is at a first predetermined track and the rotation angle of said disk substrate is at a predetermined rotation angle, said beam-adjusting system continuously irradiates the electron beam over said first predetermined plural number of tracks in the radial direction of said disk substrate towards the outer periphery side of said disk substrate from said first predetermined track, and thereafter, when the irradiation position of the electron beam is at a second predetermined track that is apart from said first predetermined track by at least said first predetermined plural number of tracks towards the outer periphery side of said disk substrate and the rotation angle of said disk substrate is at said predetermined rotation angle, said beam-adjusting means continuously irradiates the electron beam over said second predetermined plural number of tracks in the radial direction of said disk substrate towards the outer periphery side of said disk substrate from said second predetermined track, so that a longitudinal continuous pattern longer than the track-to-track distance for said first predetermined plural number of tracks is formed as a latent image at said predetermined rotation angle of said disk substrate.

7. The electron beam recording apparatus according to claim 1 , wherein said predetermined pattern is a pattern in which a servo zone and a data zone are repeated for each predetermined angle, and said servo zone includes patterns extending over said plurality of tracks.

8. The electron beam recording apparatus according to claim 7 , wherein said servo zone includes a mark part which contains at least one of a clock signal, an address signal for representing address information on a track and a position detecting signal.

9. The electron beam recording apparatus according to claim 8 , wherein said clock signal is formed in a servo clock area, said address signal is formed in an address mark area, and said position detecting signal is formed in a position detection mark area, respectively.

10. An electron beam recording method comprising steps of:

rotating a disk substrate on which a resist layer is formed;

irradiating an electron beam onto the surface of said resist layer;

shifting the irradiation position of said electron beam in a radial direction of said disk substrate;

acquiring a rotational angle of said disk substrate;

acquiring a shift position of said disk substrate; and

forming a latent image corresponding to a predetermined pattern in said resist layer by controlling the irradiation in said irradiating step on said resist layer in accordance with said rotational angle of said disk substrate, said shift position and said predetermined pattern;

wherein said irradiating step irradiates said electron beam in such a manner as to spread over a plurality of tracks in the direction of traversing the tracks on said resist layer in response to the irradiation position control in said forming step.

11. An apparatus for controlling an electron beam system comprising:

a first control unit for acquiring a rotational angle of a rotating disk substrate;

a second control unit for acquiring a shift position of said rotating disk substrate; and

a third control unit for forming a latent image corresponding to a predetermined pattern in said disk substrate by controlling an irradiation position caused by an electron beam on said disk substrate in accordance with said rotational angle of said disk substrate, said shift position and said predetermined pattern, wherein said third control unit adjusts irradiation of said electron beam to spread over a plurality of tracks in the direction of traversing the tracks on said disk substrate.

12. A method for controlling an electron beam system comprising the steps of:

acquiring a rotational angle of a rotating disk substrate;

acquiring a shift position of said rotating disk substrate; and

forming a latent image corresponding to a predetermined pattern in said disk substrate by controlling an irradiation position caused by an electron beam on said disk substrate in accordance with said rotational angle of said disk substrate, said shift position and said predetermined pattern, wherein said forming step further comprises adjusting irradiation of said electron beam to spread over a plurality of tracks in the direction of traversing the tracks on said disk substrate.