Anode module for a liquid metal anode X-ray source, and X-ray emitter comprising an anode module
View Patent ↗The invention relates to an anode module 1 for a liquid-metal anode X-ray source which has an electron entry window 3 in the region of focus 2. It is provided according to the invention that an X-ray beam exit window 4 lies opposite the electron entry window 3 of the anode module 1 and the exit angle Θ of the X-ray beams 7 between an electron beam 6 entering through the electron entry window 3 along the direction of incidence 5 and the X-ray beams 7 exiting through the X-ray beam exit window 4 is between 5° and 50°, in particular 15°. The invention also relates to an X-radiator with an electron source for the emission of electrons and a liquid-metal anode emitting X-ray beams 7 when the electrons strike, which has an anode module 1 with the above-named features.
1. An anode module for a liquid metal anode x-ray source the anode module comprising:
an electron entry window on the anode module in a region of focus; and
an x-ray beam exit window on a portion of the anode module opposite the electron entry window,
wherein an exit angle (Θ) between an electron beam that enters the electron entry window along a direction of incidence and an x-ray beam that exits the x-ray beam exit window is between 5° and 50°.
2. An anode module according to claim 1 , wherein the electron entry window is one of a metal foil, a diamond film, a ceramic material or a monocrystal from 5 μm to 30 μm thick.
3. An anode module according to claim 2 , wherein the metal foil comprises tungsten.
4. An anode module according to claim l, wherein the x-ray beam exit window is a steel sheet from 100 μm to 400 μm thick.
5. An anode module according to claim 1 , wherein in the region of focus the anode module is from 100 μm to 350 μm thick in a direction of the incident electron beam.
6. An anode module according to claim 1 , wherein in the region of focus the anode module has a constricting channel in a direction of the incident electron beam, and
wherein outside the region of focus, the anode module is from 5 mm to 10 mm thick.
7. An anode module according to claim 1 , wherein the electron entry window is convexly curved perpendicular to a direction of flow of the liquid metal.
8. An anode module according to claim 1 , wherein the x-ray beam exit window is concavely curved perpendicular to a direction of flow of the liquid metal.
9. An anode module according to claim 1 , wherein the focus length is 2 mm to 8 mm.
10. An anode module according to claim 1 , wherein the effective focus size is 1 mm×1.3 mm.
11. An anode module according claim 1 , wherein an axis of the region of focus stands perpendicular to a direction of flow of the liquid metal.
12. An anode module according to claim 1 , wherein an angle of incidence (α) is between 5° and 65°.
13. An anode module according to claim 1 , wherein an anode angle (β) is between 10° and 50°.
14. An anode module according to claim 1 , wherein the angle of incidence (α), the anode angle (β) and the exit angle (Θ) all lie in a single plane.
15. An anode module for a liquid metal anode x-ray source, the anode module comprising:
an electron entry window formed on the anode module in a region of focus,
wherein the electron entry window is convexly curved perpendicular to a direction of flow of the liquid metal.