Method for fabricating image display device
View Patent ↗There is provided a method for fabricating an image display device having an active matrix substrate including high-performance transistor circuits operating with high mobility as drive circuits for driving pixel portions which are arranged as a matrix. The portion of a polysilicon film formed in a drive circuit region DAR 1 provided on the periphery of the pixel region PAR of the active matrix substrate SUB 1 composing the image display device is irradiated and scanned with a pulse modulated laser beam or a pseudo CW laser beam to be reformed into a quasi-strip-like-crystal silicon film having a crystal boundary continuous in the scanning direction so that discrete reformed regions each composed of the quasi-strip-like-crystal silicon film are formed. In virtual tiles TL composed of the discrete reformed regions, drive circuits having active elements such as thin-film transistors or the like are formed such that the channel directions thereof coincide with the direction of crystal growth in the quasi-strip-like-crystal silicon film.
1. A method for fabricating an image display device comprising an active matrix substrate having a pixel region formed with a large number of pixels arranged as a matrix and a drive circuit region formed with an active circuit for supplying a drive signal to said pixels from outside said pixel region, the method comprising the steps of:
forming a polycrystalline silicon film over said pixel region and said drive circuit region of said active matrix substrate;
selectively irradiating a portion of the polycrystalline silicon film located in said drive circuit region with a laser beam having a pulse width and/or a pulse interval modulated by scanning the laser beam or the substrate to form discrete reformed regions each composed of a quasi-strip-like-crystal silicon film resulting from reformation, said quasi-strip-like-crystal silicon film having a crystal boundary continuous in the direction of scanning; and
forming the active circuit such that a carrier moving direction coincides with a direction of said crystal boundary in each of said discrete reformed regions,
wherein said laser beam is a continuous-wave laser beam or a pseudo continuous-wave laser beam before a pulse width and/or a pulse interval of said laser beam is modulated,
wherein the irradiation with said laser beam having the pulse width and/or pulse interval modulated is performed intermittently at specified intervals to form, into a generally rectangular configuration, each of individual reformed regions composing each of said discrete reformed regions, and
wherein the irradiation with said laser beam having the pulse width and/or pulse interval modulated is performed intermittently along one of the peripheral sides of the active matrix substrate to arrange the individual reformed regions composing each of said discrete reformed regions at specified intervals in a direction in which said drive circuit region extends,
wherein said drive circuit region has a first region and a second region which extend in a direction along one of the peripheral sides of the active matrix substrate respectively in one image display device,
wherein the scanning with said laser beam having the pulse width and/or pulse interval modulated is performed reciprocally such that a scanning direction of said first region is opposite to a scanning direction of said second region along said one of the peripheral sides of the active matrix substrate to arrange the individual reformed regions composing each of said discrete reformed regions at specified intervals in a direction in which said circuit region extends.
2. The method of claim 1 , wherein the scanning with said laser beam having the pulse width and/or pulse interval modulated is performed along each of opposing two of the peripheral sides of the active matrix substrate to arrange the individual reformed regions composing each of said discrete reformed regions formed along each of the two sides at specified intervals in a direction in which said drive circuit region disposed along each of the two sides extends.
3. The method of claim 1 , wherein the scanning with said laser beam having the pulse width and/or pulse interval modulated is performed along one of the sides of the active matrix substrate and along a side adjacent to said one side to arrange the individual reformed regions composing each of said discrete reformed regions at specified intervals in a direction in which said drive circuit region disposed along said one side extends and in a direction in which said drive circuit region disposed along the adjacent side extends.
4. The method of claim 1 , wherein the scanning with said laser beam having the pulse width and/or pulse interval modulated is performed along each of opposing two of the sides of the active matrix substrate and along a side adjacent to each of said two sides to arrange the individual reformed regions composing each of said discrete reformed regions at specified intervals in a direction in which said drive circuit region disposed along each of said two sides extends and in a direction in which said drive circuit disposed along the adjacent side extends.
5. The method of claim 1 , wherein said plurality of discrete reformed regions are divided into blocks and said blocks are arranged in two or more rows parallel with each other in a direction in which said drive circuit region extends.
6. The method of claim 5 , wherein the individual reformed regions composing each of the discrete reformed regions that have been divided into blocks are arranged in two or more rows parallel with each other in a direction in which said drive circuit region extends.
7. The method of claim 5 , wherein said blocks of said discrete reformed regions are arranged in two or more rows parallel to each other in mutually staggered relation in a direction in which said drive circuit region extends.
8. The method of claim 7 , wherein the individual reformed regions composing each of the discrete reformed regions that have been divided into blocks are arranged in two or more rows parallel with each other in mutually staggered relation in a direction in which said drive region extends.
9. The method of claim 1 , further comprising the step of:
forming, by a photolithographic technique, a positioning mark on the amorphous silicon film or the polycrystalline silicon film on said active matrix substrate.
10. The method of claim 1 , wherein the positioning mark on said active matrix substrate is formed preliminarily on said active matrix substrate or on an underlie for the amorphous silicon film or the polycrystalline silicon film on the active matrix substrate.
11. The method of claim 1 , further comprising the step of:
forming the positioning mark on the amorphous silicon film or the polycrystalline silicon film on said active matrix substrate through irradiation with said laser having the pulse width and/or the pulse interval modulated.
12. The method of claim 1 , further comprising the step of:
forming a thin-film transistor in said active circuit.
13. The method of claim 1 , further comprising at least the steps of:
bonding, to said active matrix substrate, a color filter substrate disposed in opposing relation thereto at a specified distance therefrom; and
sealing a liquid crystal in a space between said active matrix substrate and said color filter substrate.
14. The method of claim 1 , further comprising at least the steps of:
forming an organic EL layer for each of the pixels composing said pixel region of said active matrix substrate; and
bonding a protective substrate to said active matrix substrate such that a surface formed with said organic EL layer of said active matrix substrate is covered therewith.
15. The method of claim 1 , wherein said laser beam is a solid-state laser having a wavelength of 200 nm to 1200 nm.
16. The method of claim 1 , wherein an irradiation width of said laser beam is 20 μm to 1000 μm.
17. The method of claim 1 , wherein a scanning speed of said laser beam or a scanning speed of said substrate is 50 mm/s to 3000 mm/s.