Semiconductor device and method for fabricating the same
View Patent ↗A wafer on which semiconductor elements, a multilevel interconnect layer, a bonding pad, a passivation film, and the like are formed is coated with a buffer coat film. Thereafter, the buffer coat film is patterned by exposure and development so that parts of the buffer coat film located on the bonding pads and scribe line regions and a part of the buffer coat film located on a periphery region of the wafer are removed, thereby forming apertures. The rear surface of the wafer is polished by polishing slurry with a surface protection tape bonded to the surface of the wafer by adhesive paste. In the periphery region, the apertures including the scribe line regions are blocked by the adhesive paste so that polishing slurry does not permeate.
1. A method for fabricating a semiconductor device, said method comprising the steps of:
(a) forming bonding pads above a wafer on which semiconductor elements and an interconnect layer are formed;
(b) forming a passivation film having apertures including regions of the passivation film located above parts of the bonding pads and scribe line regions after the step (a);
(c) forming a buffer coat film for covering part of the passivation film after the step (b), and removing a region of the buffer coat film extending from an edge of the wafer and located on the whole periphery region having a certain distance from the periphery of the wafer;
(d) forming, in the buffer coat film, apertures including regions of the buffer coat film above the scribe line regions and above the parts of the bonding pads, respectively;
(e) bonding a surface protection tape to the wafer using an adhesive material which contacts the passivation film in the whole periphery region of the wafer after the step (d); and
(f) polishing the rear surface of the wafer after the step (e).
2. The method for fabricating a semiconductor device of claim 1 , wherein
in the step (c), the buffer coat film is formed using a positive-type photosensitive material, and
the step (d) includes a process for exposing part of the buffer coat film located on the periphery region of the wafer.
3. The method for fabricating a semiconductor device of claim 1 , wherein
in the step (c), the buffer coat film is formed using a positive-type photosensitive material, and
the step (d) includes a process for exposing part of the buffer coat film located on the wholes of chip regions at least partly overlapped with the periphery region of the wafer.
4. The method for fabricating a semiconductor device of claim 1 , wherein
in the step (c), the buffer coat film is formed using an organic resin, and
the step (d) includes a process for selectively removing part of the buffer coat film located on the periphery region of the wafer by a solvent.
5. The method for fabricating a semiconductor device of claim 1 , wherein
in the step (c), the buffer coat film is formed using an organic resin, and
the step (d) includes a process for blowing gas on part of the buffer coat film located on the periphery region of the wafer before the curing of the buffer coat film.
6. The method for fabricating a semiconductor device of claim 1 , wherein in the step (d), the whole periphery region refers to circular regions in the periphery of the wafer.
7. A method for fabricating a semiconductor device, said method comprising the steps of:
(a) forming bonding pads above a wafer on which semiconductor elements and an interconnect layer are formed;
(b) forming a passivation film having apertures including regions of the passivation film located above parts of the bonding pads after the step (a);
(c) forming a buffer coat film for covering part of the passivation film after the step (b);
(d) forming, in the buffer coat film, apertures including regions of the buffer coat film located above scribe line regions and above the parts of the bonding pads, respectively, and reducing the thickness of an outermost peripheral part of the buffer coat film located on the whole periphery region of the wafer having a certain distance from the periphery of the wafer;
(e) bonding a surface protection tape to the wafer using an adhesive material after the step (d); and
(f) polishing the rear surface of the wafer after the step (e).
8. The method for fabricating a semiconductor device of claim 7 , wherein
in the step (d), the thickness of part of the buffer coat film located on the periphery region is reduced to 3μm or less.
9. The method for fabricating a semiconductor device of claim 6 , wherein in the step (d), the whole periphery region refers to circular regions in the periphery of the wafer.
10. A method for fabricating a semiconductor device, said method comprising the steps of:
(a) forming bonding pads above a wafer on which semiconductor elements and an interconnect layer are formed;
(b) forming a passivation film having apertures including regions of the passivation film located above parts of the bonding pads after the step (a);
(c) forming a buffer coat film for covering part of the passivation film after the step (b);
(d) forming, in the buffer coat film, apertures including regions of the buffer coat film located above a periphery region having a certain distance from the periphery of the wafer, above scribe line regions and above the parts of the bonding pads, respectively;
(e) bonding a surface protection tape to the wafer using an adhesive material which contacts the passivation film in the whole periphery region of the wafer after the step (d); and
(f) polishing the rear surface of the wafer after the step (e).