Semiconductor device including dissimilar element-diffused metal layer and manufacturing method thereof
View Patent ↗An interconnect trench is formed on a dielectric layer 12 and a first HSQ layer 14 formed on a semiconductor substrate, and a tantalum family barrier metal layer 24 a is formed all over the substrate. Then a seed copper-containing metal layer 60 and a plated copper layer 62 are formed so as to fill a part of the interconnect trench. After that, a bias-sputtered copper-containing metal layer 64 is formed on the plated copper layer 62 so as to fill the remaining portion of the interconnect trench and then heat treatment is performed. As a result, a dissimilar metal contained in the bias-sputtered copper-containing metal layer 64 diffuses uniformly into the plated copper layer 62.
1. A semiconductor device comprising:
a semiconductor substrate; and
a dissimilar element-diffused metal layer formed on said semiconductor substrate, said metal layer comprising copper and a dissimilar element other than copper and having a generally uniform orientation at a surface thereof.
2. The semiconductor device as set forth in claim 1 , wherein an average grain size of crystals of said dissimilar element-diffused metal layer is greater than an average thickness of said dissimilar element-diffused metal layer.
3. The semiconductor device as set forth in claim 1 , wherein a surface of said dissimilar element-diffused metal layer has an orientation of (200).
4. The semiconductor device as set forth in claim 1 , wherein said dissimilar element-diffused metal layer comprises one of an interconnect, a plug and a pad.
5. The semiconductor device as set forth in claim 1 , wherein said dissimilar element-diffused metal layer is formed by plating.
6. The semiconductor device as set forth above in claim 1 , wherein said dissimilar element other than copper comprises at least one of Ag, W, Mg, Be, Zn, Pd, Cd, Au, Hg, Pt, Si, Zr, Ti and Sn.
7. The semiconductor device as set forth above in claim 1 , wherein said dissimilar element other than copper comprises 5 atomic % of said dissimilar element-diffused metal layer.
8. The semiconductor device as set forth in claim 1 , wherein said dissimilar element-diffused metal layer has a grain size on an order of 10 2 μm.
9. The semiconductor device as set forth in claim 1 , wherein said dissimilar element other than copper is substantially uniformly diffused throughout said dissimilar element-diffused metal layer.
10. A semiconductor device comprising:
a semiconductor substrate; and
a dissimilar element-diffused metal layer formed on said semiconductor substrate, said metal layer comprising copper and a dissimilar element other than copper, constituted of grains of an average size not less than 1 μm.
11. The semiconductor device as set forth in claim 10 , wherein an average grain size of crystals of said dissimilar element-diffused metal layer is greater than an average thickness of said dissimilar element-diffused metal layer.
12. The semiconductor device as set forth in claim 10 , wherein a surface of said dissimilar element-diffused metal layer has an orientation of ( 200 ).
13. The semiconductor device as set forth in claim 10 , wherein said dissimilar element-diffused metal layer comprises one of an interconnect, a plug and a pad.
14. The semiconductor device as set forth in claim 10 , wherein said dissimilar element-diffused metal layer is formed by plating.
15. A semiconductor device comprising:
a semiconductor substrate;
a first interconnect formed on said semiconductor substrate; and
a second interconnect comprising a metal that is a main constituent of said first interconnect, formed in an identical interconnect layer,
wherein said second interconnect is narrower than said first interconnect, and
wherein said first interconnect and said second interconnect have a different orientation at respective surfaces thereof.
16. The semiconductor device as set forth in claim 15 , wherein a width of said second interconnect is narrower than that of said first interconnect, and a surface of said first interconnect has a principal orientation of (200), and a surface of said second interconnect has principal orientation of (111) and
wherein a width of said first interconnect is not less than 1 μm, and a width of said second interconnect is not more than 1 μm.
17. The semiconductor device as set forth in claim 15 , wherein said first interconnect comprises a dissimilar element other than a main constituent of said first interconnect diffused throughout said first interconnect.
18. The semiconductor device as set forth in claim 15 , wherein said second interconnect comprises a dissimilar element formed over an upper surface thereof.
19. A semiconductor device comprising:
a semiconductor substrate;
a first interconnect formed on said semiconductor substrate; and
a second interconnect comprising a metal that is a main constituent of said first interconnect, formed in an identical interconnect layer,
wherein said second interconnect layer is narrower than said first interconnect,
wherein said first interconnect comprises a dissimilar element other than a main constituent of said first interconnect diffused throughout said first interconnect, and
wherein said second interconnect comprises a dissimilar element formed over an upper surface thereof.
20. A metal interconnect comprising a plated metal layer comprising:
a plurality of dissimilar elements,
wherein an average size of grains contained in said plated metal layer is not less than 1 μm.
21. The metal interconnect as set forth in claim 20 , having a width not less than 1 μm.
22. A metal interconnect comprising a plated metal layer comprising:
a plurality of dissimilar elements,
wherein said plated metal layer has a single grain size.
23. The metal interconnect as set forth in claim 22 , having a width not less than 1 μm.