IP Library Granted Patent US 7,390,535
Granted Patent B2
US 7,390,535 · App. 10/613,620 · Granted Jun 24, 2008

Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings

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Quick Facts
Patent No.
US 7,390,535
App. No.
10/613,620
Granted
Jun 24, 2008
Kind
B2
Abstract

A chemical vapor deposition (CVD) system and method for applying an aluminide coating constituted by two or more extrinsic metal components on a jet engine component. The aluminide coating is capable of forming a protective complex oxide upon subsequent heating in an oxidizing environment. At least one of the extrinsic metals in the aluminide coating is provided as a first vapor phase reactant from a receptacle coupled by a closed communication path with the reaction chamber of the CVD system and free of a carrier gas. The aluminide coating is formed by the chemical combination of the first vapor phase reactant with a second vapor phase reactant either created in situ in the reaction chamber or supplied by a carrier gas to the reaction chamber from a precursor source.

Claims (56)

1. A simple chemical vapor deposition method for forming an aluminide coating containing at least two different extrinsic metals on a jet engine component, comprising:

coupling a single port of a receptacle in fluid communication with a main reaction chamber;

heating the receptacle to form a first vapor phase reactant including a first extrinsic metal that is transported without assistance of a separate flow of a carrier gas from the receptacle to the main reaction chamber;

generating a second vapor phase reactant including a second extrinsic metal inside the main reaction chamber, the second extrinsic metal differing in composition from the first extrinsic metal;

heating the jet engine component; and

contacting the first and second vapor phase reactants with the heated jet engine component to form the aluminide layer including the first and the second extrinsic metals, wherein the aluminide layer is capable of forming a complex oxide when heated in an oxidizing environment.

2. The simple chemical vapor deposition method of claim 1 wherein the first extrinsic metal of the first vapor phase reactant originates from a metal-halogen Lewis acid.

3. The simple chemical vapor deposition method of claim 2 wherein the second extrinsic metal is aluminum and the first extrinsic metal is selected from the group consisting of chromium, cobalt, hafnium, iridium, niobium, palladium, platinum, rhodium, silicon, titanium, yttrium, and zirconium.

4. The simple chemical vapor deposition method of claim 3 wherein the metal-halogen Lewis acid is provided as a hydrated or anhydrous crystalline form.

5. The simple chemical vapor deposition method of claim 2 wherein the metal-halogen Lewis acid is selected from the group consisting of AlCl 3 , CoCl 4 , CrCl 3 , CrF 3 , FeCl 3 , HfCl 3 , IrCl 3 , PtCl 4 , RhCl 3 , RuCl 3 , TiCl 4 , YCl 3 , ZrCl 4 , and ZrF 4 .

6. The simple chemical vapor deposition method of claim 1 wherein the jet engine component is fabricated from a superalloy.

7. The simple chemical vapor deposition method of claim 1 wherein the second extrinsic metal constitutes less than 10 wt. % of the aluminide layer.

8. A simple chemical vapor deposition process comprising:

placing a metal component in a deposition environment in a main reaction chamber;

transporting a first vapor phase reactant containing a first extrinsic metal to the main reaction chamber via a closed pathway from an external receptacle and without assistance of a separate flow of a carrier gas;

providing a second source of a second extrinsic metal independent of the metal component in the main reaction chamber; and

while the metal component is in the main reaction chamber, exposing the metal component, the first vapor phase reactant, and the second source to the deposition environment in the main reaction chamber for a time sufficient to form an aluminide layer at the metal component including the first and second extrinsic metals.

9. The simple chemical vapor deposition process of claim 8 wherein providing the second source further comprises:

placing an activator material and a donor material containing the second extrinsic metal into the main reaction chamber; and

reacting the activator material with the donor material to provide the second source.

10. The simple chemical vapor deposition process of claim 9 wherein reacting the activator material further comprises:

heating the activator material sufficiently to cause migration of the activator material to the donor material and to cause a chemical reaction releasing the second source.

11. The simple chemical vapor deposition process of claim 8 wherein providing the second source further comprises:

transporting a vapor containing the second source to the main reaction chamber in a flow of carrier gas.

12. A simple chemical vapor deposition method for forming a coating on a jet engine component, comprising:

placing the jet engine component in a deposition environment in a main reaction chamber adapted to hold the jet engine component on which the coating is to be formed;

heating the jet engine component;

heating a receptacle external to the main reaction chamber to form a first vapor phase reactant;

transporting the first vapor phase reactant to the deposition environment inside the main reaction chamber via a closed first communication path coupling the receptacle with the main reaction chamber while the heated jet engine component is in the main reaction chamber and without assistance of a separate flow of a carrier gas;

providing a second vapor phase reactant including a second extrinsic metal independent of the jet engine component in the deposition environment inside the main reaction chamber; and

forming the coating including the first extrinsic metal on the heated jet engine component by cooperation between the first vapor phase reactant and the second vapor phase reactant.

13. The simple chemical vapor deposition method of claim 12 wherein the second vapor phase reactant includes a second extrinsic metal differing in composition from the first extrinsic metal.

14. The simple chemical vapor deposition method of claim 12 wherein forming the coating further comprises:

contacting the first and second vapor phase reactants with the heated jet engine component for a time sufficient to form the coating including the first and second extrinsic metals on the jet engine component.

15. The simple chemical vapor deposition method of claim 12 further comprising:

coupling a single port of the receptacle in fluid communication with the main reaction chamber, the receptacle being sealed but for the first communication path that is otherwise closed.

16. A simple chemical vapor deposition method for forming a coating on a jet engine component positioned inside a deposition environment of a main reaction chamber, the method comprising:

placing an amount of a metal-halogen Lewis acid material in a solid phase into a receptacle external to the main reaction chamber;

heating the metal-halogen Lewis acid held in the receptacle to form a first vapor phase reactant including a first extrinsic metal;

transporting the first vapor phase reactant from the receptacle to the deposition environment inside the main reaction chamber without assistance of a separate flow of a carrier gas from the receptacle to the main reaction chamber; and

contacting the first vapor phase reactant with the jet engine component to form the coating including the first extrinsic metal.

17. The simple chemical vapor deposition method of claim 16 wherein the metal-halogen Lewis acid is provided as a hydrated or anhydrous crystalline form.

18. The simple chemical vapor deposition method of claim 16 wherein the metal-halogen Lewis acid is selected from the group consisting of AlCl 3 , CoCl 4 , CrCl 3 , CrF 3 , FeCl 3 , HfCl 3 , IrCl 3 , PtCl 4 , RhCl 3 , RuCl 3 , TiCl 4 , YCl 3 , ZrCl 4 , and ZrF 4 .

19. The simple chemical vapor deposition method of claim 16 wherein the jet engine component is fabricated from a superalloy.

20. The simple chemical vapor deposition method of claim 16 wherein the coating is an aluminide layer, and further comprising:

generating a second vapor phase reactant including a second extrinsic metal inside the deposition environment, the second extrinsic metal differing in composition from the first extrinsic metal;

heating the jet engine component; and

contacting the first and second vapor phase reactants with the heated jet engine component to form the aluminide layer including the first and the second extrinsic metals.

21. The simple chemical vapor deposition method of claim 20 wherein the second vapor phase reactant is formed independent of the jet engine component in the deposition environment inside the main reaction chamber.

22. The simple chemical vapor deposition method of claim 20 wherein the second extrinsic metal is aluminum and the first extrinsic metal is selected from the group consisting of chromium, cobalt, hafnium, iridium, niobium, palladium, platinum, rhodium, silicon, titanium, yttrium, and zirconium.

23. The simple chemical vapor deposition method of claim 16 wherein heating the metal-halogen Lewis acid further comprises:

transforming the metal-halogen Lewis acid material from the solid phase through a liquid phase into a vapor phase to form the first vapor phase reactant.

24. The simple chemical vapor deposition method of claim 23 wherein the solid phase of the metal-halogen Lewis acid material is in a hydrated or anhydrous crystalline form.

25. The simple chemical vapor deposition method of claim 23 wherein transforming the metal-halogen Lewis acid material further comprises:

heating the receptacle to a first temperature effective to convert from the metal-halogen Lewis acid material from the solid phase to the liquid phase; and

continuing to heat the receptacle to a second temperature effective to convert from the liquid phase to the vapor phase of the first vapor phase reactant.

Assignments (6)
SECURITY INTEREST Recorded Aug 2, 2019
From: MT COATINGS, LLC; AMK WELDING, INC.
To: COMMERCE BANK
Reel/Frame 049938/0970 →
CORRECTION TO THE ADDRESS OF THE RECEIVING PARTY IN A COVER SHEET PREVIOUSLY RECORDED AT REEL/FRAME 023094/0973 Recorded Dec 22, 2009
From: AEROMET TECHNOLOGIES, INC.
To: MT COATINGS, LLC
Reel/Frame 023698/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED ON REEL 023220 FRAME 0509. ASSIGNOR(S) HEREBY CONFIRMS THE DOCUMENT BEING SUBMITTED FOR RECORDATION IS A SECURITY AGREEMENT RATHER THAN AN ASSIGNMENT. Recorded Sep 22, 2009
From: MT COATINGS, LLC
To: AEROMET TECHNOLOGIES, INC.
Reel/Frame 023263/0058 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 14, 2009
From: MT COATINGS, LLC
To: AEROMET TECHNOLOGIES, INC.
Reel/Frame 023220/0509 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 17, 2009
From: AEROMET TECHNOLOGIES, INC.
To: MT COATINGS, LLC
Reel/Frame 023094/0973 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 3, 2003
From: FAIRBOURN, DAVID C.
To: AEROMET TECHNOLOGIES, INC.
Reel/Frame 014267/0134 →