Surface treating apparatus
View Patent ↗A surface treating process according to the present invention, a vapor deposited film is formed from an easily oxidizable vapor-depositing material on the surface of a work by evaporating the vapor-depositing material in a state in which the vapor deposition controlling gas has been supplied to at least zones near a melting/evaporating source and the work within a treating chamber. Thus, the vapor deposited film can be formed stably on the surface of a desired work without requirement of a long time for providing a high degree of vacuum and without use of a special apparatus. In addition, the use of the surface treating process ensures that a corrosion resistance can be provided to a rare earth metal-based permanent magnet extremely liable to be oxidized, without degradation of a high magnetic characteristic of the magnet. A surface treating apparatus according to the present invention includes a melting/evaporating source for melting and evaporating a wire-shaped vapor-depositing material containing a vapor deposition controlling gas, and a member for retaining a work on which the vapor-depositing material is deposited. The melting/evaporating source and the work retaining member are disposed in a treating chamber of the surface treating chamber. The apparatus further includes a vapor-depositing material supply means for supplying the wire-shaped vapor-depositing material containing the vapor deposition controlling gas to the melting-evaporating source.
1. A surface treating apparatus comprising:
a treating chamber connected to an evacuating system;
a melting/evaporating source for melting and evaporating a wire-shaped vapor-depositing material containing a vapor deposition controlling gas, disposed in the treating chamber;
a rotatable cage-shaped, work retaining member, disposed in the treating chamber, and spaced above the melting/evaporating source, for retaining a work on which the vapor depositing material is deposited;
a supply of wire-shaped vapor-depositing material containing a predetermined amount of the vapor deposition controlling gas wound about a feed reel;
a thermal resistant protective tube disposed between the feed reel and the melting/evaporating source; and
the feed reel being mounted so as to rotate about a substantially vertical rotational axis, and disposed in the treating chamber below the melting/evaporating source;
such that, as the wire-shaped vapor-depositing material containing the vapor deposition controlling gas is supplied from the feed reel to the melting/evaporating source, the wire-shaped vapor-depositing material containing the vapor deposition controlling gas has a horizontally disposed lower portion, a vertically disposed intermediate portion and a horizontally disposed upper portion, and the wire-shaped vapor-depositing material containing the vapor deposition controlling gas is protected by the thermal resistant protective tube between the feed reel and the melting/evaporating source.
2. A surface treating apparatus according to claim 1 , wherein said vapor deposition controlling gas is hydrogen.
3. A surface treating apparatus according to claim 1 , wherein the molar ratio of said vapor deposition controlling gas to oxygen in at least a space between said melting/evaporating source and said work within said treating chamber can be adjusted by the feed rate of said vapor-depositing material fed from said feed reel.