Nitride semiconductor laser device chip and laser apparatus including the same
View Patent ↗A nitride semiconductor laser device chip has a nitride semiconductor stacked-layered structure including an n-type layer, an active layer and a p-type layer stacked successively on a main surface of a nitride semiconductor substrate. A ridge stripe structure is formed in a portion of the p-type layer. The chip has a length L 1 of more than 500 μm in a longitudinal direction of the stripe structure and a length L 2 of more than 200 μm in a width direction of the stripe structure, and L 1 /L 2 is more than 2.5.
1. A nitride semiconductor laser apparatus comprising a nitride semiconductor laser device chip, a support member for placing said chip thereon, and a solder for joining said laser device chip to said support member, wherein:
said chip has a nitride semiconductor stacked-layered structure of a hexagonal crystal system including an n-type layer, an active layer and a p-type layer successively stacked on a first main surface of a nitride semiconductor substrate of the same hexagonal crystal system and has a ridge stripe structure formed in a portion of said p-type layer;
said chip has a length L 1 of more than 500 μm in a longitudinal direction of said stripe structure and a length L 2 of more than 200 μm and less than 300 μm in a width direction of said stripe structure, and L 1 /L 2 is more than 2.5;
a total thickness of said nitride semiconductor substrate and said nitride semiconductor stacked-layered structure is more than 50 μm and less than 200 μm;
a multilayer metal film including an outermost layer of Au is formed on said nitride semiconductor laser device chip;
said outermost layer of Au is bonded to said support member with said solder; and
said solder includes one of AuSn, AgSn, AuGe, PbSn, InSn, and AgCuSn.
2. The nitride semiconductor laser apparatus of claim 1 , wherein said stripe structure is formed at a position more than 10 μm away in the width direction of said stripe structure from an edge of said chip.
3. The nitride semiconductor laser apparatus of claim 1 , wherein said support member has a larger thermal expansion coefficient as compared to said nitride semiconductor substrate.
4. The nitride semiconductor laser apparatus of claim 1 , wherein said support member includes one of Al, Ag, Cu, Au, Fe, Al—SiC, CuW and BeO.
5. The nitride semiconductor laser apparatus of claim 1 , wherein:
a multilayer metal film including an outermost layer of Au is formed on a second main surface of the nitride semiconductor substrate opposite said first main surface; and
said outermost layer of Au is connected to said support member of by said solder.
6. The nitride semiconductor laser apparatus of claim 1 , wherein:
a multilayer metal film including an outermost layer of Au is formed on said nitride semiconductor stacked-layer structure; and
said outermost layer of Au is connected to said support member by said solder.
7. The nitride semiconductor laser apparatus of claim 1 , wherein said chip has a first pair of side surfaces parallel to and a second pair of side surfaces perpendicular to the longitudinal direction of said stripe structure, only said second pair of side surfaces being formed by cleavage.