Autofocus module for microscope-based systems
View Patent ↗The autofocus module possesses, between the detector element ( 43 ) and the optical means, a cylindrical lens ( 42 ) that, for determination of the focus position, generates a line on the detector element ( 43 ). In addition, the detector element ( 43 ) is pivotable about an axis in such a way that it is inclined with respect to a plane defined by the surface of the specimen ( 20 ), and its inclination is adjustable. All the optical components of the autofocus module are combined in a housing ( 25 ) that can be quickly flange-mounted onto an existing microscope-based system ( 1 ).
1. An autofocus module for a microscope-based system, comprising:
an objective that defines an image beam path which is perpendicular to a surface of a specimen
an illumination beam path that encompasses a light source for illumination of the specimen,
a light source for generating a measurement light bundle for determining a focus position;
an optical means for splitting the measurement light bundle in such a way that an eccentrically extending measurement light beam bundle is created;
a first dichroic beam splitter is provided in the image beam path of the microscope-based system, which couples the measurement light beam bundle eccentrically into the microscope-based system and directs it onto the surface of the specimen;
the optical means directs onto a detector element a measurement light beam bundle remitted from the microscope-based system; and
a cylindrical lens between the detector element and the optical means.
2. The autofocus module as defined in claim 1 , wherein the optical means is embodied as a prism that has one fully mirror-coated prism surface and one prism surface for total reflection, the mirror-coated prism surface generating, from the measured light bundle, an eccentrically extending measurement light beam bundle.
3. The autofocus module as defined in claim 1 , wherein the detector element is a two-dimensional area sensor.
4. The autofocus module as defined in claim 1 , wherein the detector element comprises at least two linear sensors arranged parallel to one another.
5. The autofocus module as defined in claim 1 , wherein the light source, the detector element, the optical means, the cylindrical lens, the stationary lens and a displaceable lens, a second dichroic beam splitter, and the displacement means are arranged in a housing.
6. The autofocus module as defined in claim 5 , wherein the lens is displaceable in manual or motorized fashion in the direction of a dashed double arrow.
7. The autofocus module as defined in claim 5 , wherein housing can be attached to the microscope-based system.
8. The autofocus module as defined in claim 1 , wherein the light source is a laser light source.
9. The autofocus module as defined in claim 8 , wherein the laser light source emits IR light as the measurement light.
10. The autofocus module as defined in claim 1 , wherein the microscope-based system and the autofocus module are connected to a computer.
11. An autofocus module for a microscope-based system, comprising:
an objective that defines an image beam path which is perpendicular to a surface of a specimen
an illumination beam path that encompasses a light source for illumination of the specimen,
a light source for generating a measurement light bundle for determining a focus position;
an optical means for splitting the measurement light bundle in such a way that an eccentrically extending measurement light beam bundle is created;
a first dichroic beam splitter is provided in the image beam path of the microscope-based system, which couples the measurement light beam bundle eccentrically into the microscope-based system and directs it onto the surface of the specimen;
the optical means directs onto a detector element a measurement light beam bundle remitted from the microscope-based system, wherein displacement means are provided which incline the detector element with respect to a plane defined by the surface of the specimen; and
a cylindrical lens between the detector element and the optical means.
12. The autofocus module as defined in claim 11 , wherein the optical means is embodied as a prism that has one fully mirror-coated prism surface and one prism surface for total reflection, the mirror-coated prism surface generating, from the measured light bundle, an eccentrically extending measurement light beam bundle.
13. The autofocus module as defined in claim 11 , wherein the detector element is a two-dimensional area sensor.
14. The autofocus module as defined in claim 11 , wherein the detector element comprises at least two linear sensors arranged parallel to one another.
15. The autofocus module as defined in claim 11 , wherein the light source, the detector element, the optical means, the cylindrical lens, the stationary lens and a displaceable lens, a second dichroic beam splitter, and the displacement means are arranged in a housing.
16. The autofocus module as defined in claim 15 , wherein the lens is displaceable in manual or motorized fashion in the direction of a dashed double arrow.
17. The autofocus module as defined in claim 15 , wherein housing can be attached to the microscope-based system.
18. The autofocus module as defined in claim 11 , wherein the light source is a laser light source.
19. The autofocus module as defined in claim 18 , wherein the laser light source emits IR light as the measurement light.
20. The autofocus module as defined in claim 11 , wherein the microscope-based system and the autofocus module are connected to a computer.
21. An autofocus module for a microscope-based system, comprising:
an objective that defines an image beam path which is perpendicular to a surface of a specimen
an illumination beam path that encompasses a light source for illumination of the specimen,
a light source for generating a measurement light bundle for determining a focus position;
an optical means for splitting the measurement light bundle in such a way that an eccentrically extending measurement light beam bundle is created;
a first dichroic beam splitter is provided in the image beam path of the microscope-based system, which couples the measurement light beam bundle eccentrically into the microscope-based system and directs it onto the surface of the specimen;
the optical means directs onto a detector element a measurement light beam bundle remitted from the microscope-based system, wherein a displacement means is provided which inclines the detector element exclusively about an axis that is parallel to the X axis of a Cartesian coordinate system; and
a cylindrical lens between the detector element and the optical means.
22. The autofocus module as defined in claim 21 , wherein the optical means is embodied as a prism that has one fully mirror-coated prism surface and one prism surface for total reflection, the mirror-coated prism surface generating, from the measured light bundle, an eccentrically extending measurement light beam bundle.
23. The autofocus module as defined in claim 21 , wherein the detector element is a two-dimensional area sensor.
24. The autofocus module as defined in claim 21 , wherein the detector element comprises at least two linear sensors arranged parallel to one another.
25. The autofocus module as defined in claim 1 , wherein the light source, the detector element, the optical means, the cylindrical lens, the stationary lens and a displaceable lens, a second dichroic beam splitter, and the displacement means are arranged in a housing.
26. The autofocus module as defined in claim 25 , wherein the lens is displaceable in manual or motorized fashion in the direction of a dashed double arrow.
27. The autofocus module as defined in claim 25 , wherein housing can be attached to the microscope-based system.
28. The autofocus module as defined in claim 21 , wherein the light source is a laser light source.
29. The autofocus module as defined in claim 28 , wherein the laser light source emits IR light as the measurement light.
30. The autofocus module as defined in claim 21 , wherein the microscope-based system and the autofocus module are connected to a computer.