Microactuator for a hard disk drive with an integrated gimbal function
View Patent ↗A micro-fabricated chip having a stationary structure and a movable structure with a gimbal structure allows pitch and roll motion of the movable structure with respect to the stationary structure. One embodiment of the gimbal structure includes a dimple surface making a rolling-type contact with the stationary structure, and a center bar and a plurality of bar members. An alternative embodiment of the gimbal structure includes a plurality of torsion bar members. Another alternative embodiment of the gimbal structure includes a plurality of flexible members. The micro-fabricated chip can be a passive chip structure or, alternatively, a microactuator having a movable structure that moves in a rotational direction or a translational direction with respect to the stationary structure.
1. A micro-fabricated chip, comprising:
a stationary structure; and
a movable structure attached to the stationary structure, the movable structure comprising:
a gimbal structure contacting the stationary structure;
a microactuator structure attached to the gimbal structure and the stationary structure, the microactuator structure configured to move the gimbal structure in pitch and roll directions; and
a slider attached to the gimbal structure such that the microactuator structure moves the movable structure and hence the slider in the pitch and roll directions with respect to the stationary structure.
2. The micro-fabricated chip according to claim 1 , wherein the gimbal structure includes a dimple making a rolling-type contact with the stationary structure.
3. The micro-fabricated chip according to claim 2 , wherein the movable structure moves in a rotational direction with respect to the stationary structure.
4. The micro-fabricated chip according to claim 2 , wherein the movable structure moves in a translational direction with respect to the stationary structure.
5. A suspension for a disk drive, comprising:
a load beam;
a micro-fabricated chip comprising:
a stationary structure attached to the load beam;
a movable structure attached to the stationary structure, the moveable structure comprising:
a gimbal structure contacting the stationary structure;
a microactuator structure attached to the gimbal structure and the stationary structure, the microactuator structure configured to move the gimbal structure in pitch and roll directions; and
a slider attached to the gimbal structure such that the microactuator structure moves the movable structure and hence the slider in the pitch and roll directions with respect to the stationary structure.
6. The suspension according to the claim 5 , wherein the gimbal structure includes a dimple making a rolling-type contact with the stationary structure.
7. The suspension of claim 6 wherein the movable structure and the slider move in a rotational direction with respect to the stationary structure.
8. The suspension according to claim 6 , wherein the movable structure moves in a translational direction with respect to the stationary structure.
9. A disk drive, comprising:
a suspension having a load beam;
a micro-fabricated chip comprising:
a stationary structure attached to the load beam;
a movable structure attached to the stationary structure, the moveable structure comprising:
a gimbal structure contacting the stationary structure;
a microactuator structure attached to the gimbal structure and the stationary structure, the microactuator structure configured to move the gimbal structure in pitch and roll directions; and
a slider attached to the gimbal structure such that the microactuator structure moves the movable structure and hence the slider in the pitch and roll directions with respect to the stationary structure.
10. The disk drive according to claim 9 , wherein the gimbal structure includes a dimple making a rolling-type contact with the stationary structure.
11. The disk drive according to claim 10 , wherein the movable structure and the slider move in a rotational direction with respect to the stationary structure.
12. The disk drive according to claim 10 , wherein the movable structure moves in a translational direction with respect to the stationary structure.