Drive device of liquid droplet discharge head, film manufacturing apparatus, drive method of liquid droplet discharge head, film manufacturing method, and electronic equipment and device production method
View Patent ↗This drive device of a liquid droplet discharge head inhibits deterioration of a piezoelectric vibrator, enabling stable liquid droplets to be discharged from the liquid droplet discharge head over a long period of time. This drive device of a liquid droplet discharge head is provided with a piezoelectric vibrator 20 that extends and retracts according to a predetermined drive waveform, a drive control circuit 10 that functions as a drive control unit, and a drive wave generation circuit 30 . The drive control circuit 10 drives the piezoelectric vibrator 20 by generating a drive waveform that is free of sharp edges and composed of a curved waveform based on a waveform generated by the drive waveform generation circuit 30.
1. A drive device of a liquid droplet discharge head comprising a piezoelectric vibrator which discharges liquid droplets from a discharge section by applying a predetermined drive waveform to said piezoelectric vibrator, wherein
a drive control unit is provided that drives said piezoelectric vibrator according to said drive waveform composed of a curved shape, and
said drive waveform is free of sharp edges.
2. A drive device of a liquid droplet discharge head according to claim 1 , wherein said drive waveform is generated by being converted from a rectangular or trapezoidal square wave by a waveform conversion unit.
3. A drive device of a liquid droplet discharge head according to claim 1 , wherein said drive waveform contains a discharge waveform for discharging said liquid droplets, and a microvibration waveform that minutely vibrates said piezoelectric vibrator to a degree that it does not discharge said liquid droplets.
4. A film manufacturing apparatus provided with a drive device of a liquid droplet discharge head according to claim 1 that performs film manufacturing treatment at a predetermined location on a treated object by discharging a functional liquid from said liquid droplet discharge head.
5. A film manufacturing apparatus according to claim 4 , wherein said film manufacturing apparatus is a device that produces a color filter.
6. A film manufacturing apparatus according to claim 4 , wherein said film manufacturing apparatus is a device that forms a film having for its constituent element an organic electroluminescence element.
7. A film manufacturing apparatus according to claim 4 , wherein, said film manufacturing apparatus is a device that discharges a liquid containing metallic fine particles from said liquid droplet discharge head, and which forms a film to serve as metal wiring by discharging said liquid onto a desired surface.
8. A drive method of a liquid droplet discharge head comprising discharging of liquid droplets from a discharge section by extending and retracting a piezoelectric vibrator according to a predetermined drive waveform, wherein
said method has a process of driving said piezoelectric vibrator according to said drive waveform composed of a curved waveform, and
said drive waveform is free of sharp edges.
9. A drive method of a liquid droplet discharge head according to claim 8 , wherein said drive waveform is generated based on a rectangular or trapezoidal square wave.
10. A drive method of a liquid droplet discharge head according to claim 8 , wherein said drive waveform contains a discharge waveform for discharging said liquid droplets, and a microvibration waveform that minutely vibrates said piezoelectric vibrator to a degree that it does not discharge said liquid droplets.
11. A film manufacturing method that forms a film using the drive method of a liquid droplet discharge head according to claim 8 .
12. A film manufacturing method according to claim 11 , wherein, said film manufacturing method is used when forming a film to serve as a constituent element of a color filter.
13. A film manufacturing method according to claim 11 , wherein, said film manufacturing method is used when forming a film serving as constituent element of an organic electroluminescence element.
14. A film manufacturing method according to claim 11 , wherein, said film manufacturing method forms a film to serve as metal wiring by discharging a liquid containing metallic fine particles from said liquid droplet discharge head onto a desired surface.
15. A device production method for producing a device by coating a functional liquid at a predetermined location on a substrate, wherein a step is contained in which the functional liquid is discharged at a predetermined location of said substrate from said liquid droplet discharge head using a drive method of a liquid droplet discharge head according to claim 8 .