Etching of solar cell materials
View Patent ↗A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For example, an etchant comprising sulfuric acid and hydrogen peroxide may be employed to etch the copper layer selective to the tin layer. A particular example of the aforementioned etchant is a Co-Bra Etcho® etchant modified to comprise about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide. In one embodiment, an aluminum layer in the solar cell is etched without substantially etching the tin layer. For example, an etchant comprising potassium hydroxide may be employed to etch the aluminum layer without substantially etching the tin layer.
1. A method of fabricating a solar cell, the method comprising:
etching a first layer comprising copper without substantially etching a topmost metallic layer comprising tin on a backside of a solar cell, the backside of the solar cell being opposite a front side for collecting solar radiation, the topmost metallic layer providing a solderable metallic surface for electrically coupling the solar cell to an external electrical circuit and protecting a second layer during etching of the first layer, the second layer being between the topmost metallic layer and the first layer.
2. The method of claim 1 wherein the first layer is etched using an etchant comprising sulfuric acid and hydrogen peroxide.
3. The method of claim 1 wherein the first layer is etched using an etchant comprising about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide.
4. The method of claim 1 wherein the first layer is etched using an etchant comprising about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide.
5. The method of claim 1 wherein the topmost metallic layer is etched using an etchant comprising sulfuric acid and hydrogen peroxide.
6. The method of claim 1 further comprising:
etching a second layer comprising titanium-tungsten using an etchant comprising hydrogen peroxide.
7. The method of claim 6 further comprising:
etching a third layer comprising aluminum using an etchant comprising potassium hydroxide.
8. The method of claim 1 further comprising:
etching a second layer comprising aluminum using an etchant comprising potassium hydroxide.
9. The method of claim 8 wherein the etchant comprises about 1% by volume of potassium hydroxide in water.
10. A method of etching a layer of material in a solar cell, the method comprising:
etching a first copper layer selective to a tin layer on a backside of a solar cell using an etchant comprising sulfuric acid and hydrogen peroxide, the backside of the solar cell being opposite a front side for collecting solar radiation, the tin layer being a topmost metallic layer and configured to provide a solderable metallic surface and to protect a second layer between the tin layer and the first copper layer during etching of the first copper layer.
11. The method of claim 10 wherein the etchant comprises about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide.
12. A method of etching a layer of material in a solar cell, the method comprising:
etching a first metal layer comprising copper without substantially etching a tin layer on a backside of a solar cell, the backside being opposite a front side for collecting solar radiation, the tin layer being configured to provide a solderable metallic surface and to protect a second metal layer during etching of the first metal layer, the second layer being between the tin layer and the first metal layer.
13. The method of claim 12 wherein the first metal layer is etched using an etchant comprising about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide.
14. The method of claim 12 wherein the first metal layer is etched using an etchant comprising hydrogen peroxide and sulfuric acid.