Semiconductor device and a fabrication method thereof
View Patent ↗A semiconductor device and fabrication method thereof that uses a far ultraviolet ray photolithography, which may be used to prevent the lift phenomenon of a photoresist pattern, is disclosed. The semiconductor device may be fabricated by the process of: forming a film which is an object of forming a pattern on a structure of a semiconductor substrate; forming a anti-reflection layer on the film to form a stacking structure including the film and the anti-reflection layer; performing a plasma treatment to form grooves on a upper surface of the stacking structure; forming a photoresist pattern on the stacking structure on which the grooves are formed; and etching the stacking structure using the photoresist pattern as a mask to form a stacking structure pattern.
1. A fabricating method of a semiconductor device comprising:
(a) forming a film which to form a pattern on a structure of a semiconductor substrate;
(b) forming an anti-reflection layer on the film to form a stacking structure including the film and the anti-reflection layer;
(c) performing a plasma treatment to form grooves on an upper surface of the stacking structure, wherein the grooves are configured to increase adhesion between the upper surface of the stacking structure and a photoresist layer;
(d) forming a photoresist pattern on the stacking structure on which the grooves are formed; and
(e) etching the stacking structure using the photoresist pattern as a mask to form a stacking structure pattern.
2. The method of claim 1 , wherein performing the plasma treatment includes performing the plasma treatment for 15-30 seconds using N 2 O plasma.
3. The method of claim 1 , wherein forming the photoresist pattern includes applying a photoresist layer, exposing the photoresist layer to a light selectively, and developing the photoresist layer to form the photoresist pattern exposing a part of the stacking structure.
4. The method of claim 3 , wherein a far ultraviolet ray is used as a light source in exposing the photoresist layer to a light selectively.
5. The method of claim 1 , wherein a SiO x N y layer having thickness of 200˜300 Å is used as the anti-reflection layer.
6. The method of claim 1 , wherein the film is a metal film.
7. The method of claim 1 , wherein forming the anti-reflection layer includes forming a protective oxide layer on the anti-reflection layer after forming the anti-reflection layer to form a stacking structure including the film, the anti-reflection layer, and the protective oxide layer.
8. The method of claim 7 , wherein the protective oxide layer is formed to have thickness of equal to or less than 100 Å.
9. The method of claim 7 , wherein the plasma treatment is performed for 15-30 seconds using N 2 O plasma.
10. The method of claim 7 , wherein a SiO x N y layer having thickness of 200˜300 Å is used as the anti-reflection layer.
11. The method of claim 7 , wherein the film is a metal film.
12. A fabricating method of a semiconductor device comprising:
(a) forming a film which to form a pattern on a structure of a semiconductor substrate;
(b) forming an anti-reflection layer on the film;
(c) forming a protective oxide layer on the anti-reflection layer after forming the anti-reflection layer to form a stacking structure including the film, the anti-reelection layer, and the protective oxide layer;
(d) performing a plasma treatment to form grooves on an upper surface of the stacking structure;
(e) forming a photoresist pattern on the stacking structure on which the grooves are formed; and
(f) etching the stacking structure using the photoresist pattern as a mask to form a stacking structure pattern.
13. The semiconductor device of claim 12 , wherein the protective oxide layer is formed to have thickness of equal to or less than 100 Å.
14. The semiconductor device of claim 12 , wherein the plasma treatment is performed for 15-30 seconds using N 2 O plasma.
15. The semiconductor device of claim 12 , wherein a SiO x N y layer having thickness of 200˜300 Å is used as the anti-reflection layer.
16. The semiconductor device of claim 12 , wherein the film is a metal film.