Coated article with silicon oxynitride adjacent glass
View Patent ↗A low-E coated article is provided, in certain example embodiments, with a layer including silicon oxynitride adjacent the glass substrate in order to improve chemical and/or mechanical durability of the coated article. In certain example embodiments, the coated article may be formed so as to have a fairly high visible transmission (TY or T vis ) to sheet resistance (R s ) ratio (i.e., a ratio T vis /R s ). The higher this ratio, the better the coated article's combined functionality of providing for both good solar performance (e.g., ability to reflect and/or absorb IR radiation) and high visible transmission. Coated articles herein may be used in the context of insulating glass (IG) window units, architectural or residential monolithic window units, vehicle window units, and/or the like.
1. A coated article including a multi-layer coating supported by a glass substrate, the multi-layer coating comprising, from the glass substrate outwardly:
a layer comprising silicon oxynitride located directly on and contacting the glass substrate;
a layer comprising an oxide of titanium and/or niobium located directly on and contacting the layer comprising silicon oxynitride;
a layer comprising zinc oxide located over the layers comprising silicon oxynitride and the oxide of titanium and/or niobium;
a layer comprising silver located over and contacting the layer comprising zinc oxide;
a dielectric layer comprising a metal oxide;
another layer comprising silver; and
another dielectric layer.
2. The coated article of claim 1 , wherein the layer comprising silicon oxynitride has an index of refraction “n” of from 1.55 to 2.0.
3. The coated article of claim 1 , wherein the coated article comprises a laminated vehicle windshield, and the layer comprising silicon oxynitride has an index of refraction “n” of from 1.85 to 2.0.
4. The coated article of claim 1 , wherein the layer comprising silicon oxynitride has a thickness of from 40 to 200 Å.
5. The coated article of claim 1 , wherein the coated article is heat treated and has a visible transmission of at least 65%, measured monolithically, after heat treatment.
6. The coated article of claim 1 , wherein the coated article has a sheet resistance (R s ) of less than or equal to 4.0.
7. An IG window unit including the coated article of claim 1 .
8. The coated article of claim 1 , wherein the coated article is heat treated and is characterized by the following transmissive color at a normal viewing angle, after heat treatment:
a*
−4.5 to +1.0
b*
−1.0 to +4.0.
9. The coated article of claim 1 , wherein the layer comprising zinc oxide further includes aluminum or other metal(s).
10. The coated article of claim 1 , wherein the layer comprising silicon oxynitride has an index of refraction of at least 1.6.
11. The coated article of claim 1 , wherein the layer comprising silicon oxynitride further comprises aluminum and/or boron.
12. The coated article of claim 1 , wherein the coated article is heat treated and has a ratio T vis /R s of at least 25 after heat treatment (where T vis is visible transmission (%) and R s is sheet resistance of the coating in units of ohms/square) and ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 8 due to the heat treatment.
13. The coated article of claim 12 , wherein the coated article has a ratio T vis /R s of at least 30 after heat treatment.
14. The coated article of claim 12 , wherein the coated article has a ratio T vis /R s of at least 32 after heat treatment.
15. The coated article of claim 12 , wherein the coated article has a ratio T vis /R s of at least 34 after heat treatment.
16. The coated article of claim 1 , wherein the coated article is heat treated and has a ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 5 due to the heat treatment.
17. The coated article of claim 16 , wherein the coated article has a ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 4 due to the heat treatment.
18. The coated article of claim 16 , wherein the coated article has a ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 3 due to the heat treatment.
19. The coated article of claim 16 , wherein the coated article has a ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 2.5 due to the heat treatment.
20. The coated article of claim 1 , further comprising a layer comprising silicon nitride and/or silicon oxynitride located between the layer comprising the oxide of titanium and/or niobium and the layer comprising zinc oxide.
21. The coated article of claim 20 , wherein said layer comprising silicon nitride is non-stoichiometric and is Si-rich.
22. The coated article of claim 21 , wherein said layer comprising silicon nitride comprises Si x N y , where x/y is from 0.76 to 1.5.
23. The coated article of claim 21 , wherein said layer comprising silicon nitride comprises Si x N y , where x/y is from 0.8 to 1.0.
24. A coated article including a multi-layer coating supported by a glass substrate, the multi-layer coating comprising, from the glass substrate outwardly:
a layer comprising silicon oxynitride located directly on and contacting the glass substrate;
a layer comprising a metal oxide located directly on and contacting the layer comprising silicon oxynitride;
a layer comprising a nitride;
a layer comprising zinc oxide;
a layer comprising silver located over and contacting the layer comprising zinc oxide;
a dielectric layer comprising a metal oxide;
a layer comprising silicon nitride;
another layer comprising zinc oxide;
another layer comprising silver provided over and contacting said another layer comprising zinc oxide; and
at least one further dielectric layer.
25. The coated article of claim 24 , wherein the layer comprising silicon oxynitride has an index of refraction “n” of from 1.60 to 2.0.
26. The coated article of claim 24 , wherein the layer comprising silicon oxynitride has an index of refraction “n” of at least 1.6, and a “k” value at 550 nm of from 0.01 to 0.03.
27. The coated article of claim 24 , wherein the layer comprising silicon oxynitride further comprises aluminum and/or boron.
28. The coated article of claim 24 , wherein the coated article is heat treated and has a ratio T vis /R s of at least 30 after heat treatment (where T vis is visible transmission (%) and R s is sheet resistance of the coating in units of ohms/square) and a ΔE* value (glass side reflective and/or transmissive) of less than or equal to about 8 due to the heat treatment.
29. The coated article of claim 28 , wherein the coated article has a ratio T vis /R s of at least 32 after heat treatment.