Transparent electrode made from indium-zinc-oxide and etchant for etching the same
View Patent ↗A pixel electrode employs a transparent electrode made from indium-zinc-oxide (IZO) that is capable of preventing damage and bending thereof. In a liquid crystal display device containing pixel electrodes, the transparent electrode is made from indium-zinc-oxide (IZO) having an amorphous structure so that it can be etched within a short period of time with a low concentration of etchant. Accordingly, it is possible to prevent damage and bending of the transparent electrode upon the patterning thereof.
1. A liquid crystal display device having transparent electrodes formed on an organic insulating film,
wherein the liquid crystal display device includes a thin film transistor under the organic insulating film,
wherein said transparent electrodes include a pixel electrode and a transparent storage capacitor electrode made of indium-zinc-oxide (IZO) having an amorphous structure adapted to be etched within 300 seconds with a low concentration of etchant, and the etchant is a mixture of C 2 H 2 O 4 and de-ionized water having a ratio between 1:128 and 1:350,
wherein the pixel electrode is connected to a drain electrode of the thin film transistor through a contact hole, and
wherein the transparent storage capacitor electrode has an amorphous structure adapted to be etched via a separate contact hole substantially simultaneously with the pixel electrode with no residual IZO film remaining in the separate contact hole.
2. The liquid crystal display device according to claim 1 , wherein the etchant is the mixture of C 2 H 2 O 4 and de-ionized water in a ratio of 1:180.
3. The liquid crystal display device according to claim 1 , wherein the liquid crystal display device further includes a substrate, a gate electrode of the thin film transistor formed over the substrate, a gate insulating film formed over the gate electrode and the substrate, a semiconductor layer formed over the gate insulating film, an ohmic contact layer over the semiconductor layer, and a source electrode and the drain electrode over the ohmic contact layer, the source electrode, the drain electrode and the ohmic contact layer being patterned to be spaced by a channel over the gate electrode.
4. The liquid crystal display device according to claim 1 , wherein the organic insulating film is a nitrogen-cured film.
5. The liquid crystal display device according to claim 1 , wherein the IZO is a sputtered substance.
6. The liquid crystal display device according to claim 1 , wherein the transparent pixel electrode adheres to the organic insulating film with sufficient adhesive force such that a subsequent surface treatment process to strengthen the adhesive force can be omitted.
7. The liquid crystal display device according to claim 1 , wherein the IZO has a resistivity of 360 μΩ cm.