CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating
View Patent ↗CVD aluminide coatings including a small concentration of a reactive, gettering element for surface active impurities dispersed therein are formed for improved oxidation resistance. The aluminide coatings are formed by CVD codeposition of Al and the gettering element on the substrate using coating gases for the gettering element generated either outside or inside the coating retort depending on the chlorination temperature needed for the particular gettering element.
1. Apparatus for forming a chemical vapor deposition coating gas, comprising means for providing a halide precursor gas, a first source comprising a metal, means for flowing the halide precursor gas in contact with the first source to form a first coating gas, coating retort means, said first source being disposed outside said coating retort means, and means for flowing the first coating gas into the coating retort means in contact with a source of a reactive element disposed inside the coating retort means to convert a portion of the first coating gas to a halide coating gas of the reactive element that contacts a substrate in the coating retort means with the first coating gas to codeposit the metal and the reactive element on the substrate.
2. The apparatus of claim 1 including a secondary source of the metal upstream of the reactive element source in the coating retort means for contacting an unconverted portion of the first coating gas.
3. The apparatus of claim 2 including means for introducing another metal halide coating gas into the coating retort means upstream of the reactive element source to codeposit said another metal along with said metal and the reactive element on the substrate.
4. The apparatus of claim 1 wherein said source of said reactive element comprises particulates comprising at least one of Hf, Zr, Si, and Y.
5. Apparatus for forming a chemical vapor deposition coating gas, comprising means for providing a halide precursor gas, means for flowing the halide precursor gas in contact with a first source comprising a metal to form a first coating gas, coating retort means, means for flowing the first coating gas into the coating retort means in contact with a source of a reactive element disposed inside the coating retort means to convert a portion of the first coating gas to a halide coating gas of the reactive element, and a secondary source of said metal disposed upstream of said source of said reactive element in the coating retort means to contact an unconverted portion of the first coating gas.
6. The apparatus of claim 5 wherein said source of said reactive element comprises particulates comprising at least one of Hf, Zr, Si, and Y.
7. Apparatus for forming a chemical vapor deposition coating gas, comprising means for providing a halide precursor gas, a first source comprising aluminum, means for flowing the halide precursor gas in contact with the first source to form a first coating gas comprising aluminum halide, a coating retort, said first source being disposed outside said coating retort, and means for flowing the first coating gas into the coating retort in contact with a source of a reactive element disposed inside the coating retort to convert a portion of the first coating gas to a halide coating gas of the reactive element.
8. The apparatus of claim 7 including a secondary source comprising aluminum inside the coating retort means upstream of the reactive element source for contacting an unconverted portion of the first coating gas.
9. The apparatus of claim 8 including means for introducing another metal halide coating gas into the coating retort upstream of the reactive element source.
10. The apparatus of claim 8 wherein said source of said reactive element comprises particulates comprising at least one of Hf, Zr, Si, and Y.