Granted Patent
Utility
Small
US 6,730,614
· Confirmation No. 8408
METHOD OF FORMING A THIN FILM IN A SEMICONDUCTOR DEVICE
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-03-10 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-12-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-12-19 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-12-19 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-12-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-12-19 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-12-19 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-09 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-08-22 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-08-22 | SPEC |
Specification | 11 | View | |
| 2003-08-22 | CLM |
Claims | 3 | View | |
| 2003-08-22 | ABST |
Abstract | 1 | View | |
| 2003-08-22 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2003-08-22 | OATH |
Oath or Declaration filed | 1 | View | |
| 2003-08-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-08-22 | FOR |
Foreign Reference | 8 | View | |
| 2003-08-22 | FRPR |
Certified Copy of Foreign Priority Application | 16 | View | |
| 2003-08-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-08-22 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Jung Wook Lim
Daejon-Shi, KOREA, REPUBLIC OF
Sun Jin Yun
Daejon-Shi, KOREA, REPUBLIC OF
Jin Ho Lee
Daejon-Shi, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Classification
USPC
438/763
H10P14/432
C23C16/452
C23C16/45529
C23C16/45542
C23C16/45553
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 136
- Docket No.
- P69084US0
- Confirmation No.
- 8408
Foreign Priority
2002-75213
·
2002-11-29
·
REPUBLIC OF KOREA
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-05-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-10-16
ASSIGNMENT OF ONE HALF (1/2) OF ALL OF ASSIGNORS' RIGHT, TITLE AND INTEREST
Recorded 2009-11-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-08-22
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Quick Facts
- Patent No.
- US 6,730,614
- App. No.
- 10/645,671
- Filed
- 2003-08-22
- Granted
- 2004-05-04
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- 0 days
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