Ceramic article having corrosion-resistant layer, semiconductor processing apparatus incorporating same, and method for forming same
View Patent ↗An article is provided that includes a substrate and a corrosion-resistant coating provided on the substrate. The substrate generally consists essentially of alumina, and the corrosion-resistant coating is provided so as to directly contact the substrate without the provision of intervening layers between the substrate and the corrosion-resistant coating, such as reaction products provided by high-temperature treatment processes. The corrosion-resistant coating generally consists essentially of a rare earth oxide, and has an adhesion strength not less than about 15 MPa. According to particular embodiments, the article is a ceramic component utilized and implemented in a semiconductor processing apparatus for processing semiconductor wafers.
1. A ceramic article, comprising:
a substrate consisting essentially of alumina; and
a corrosion-resistant coating provided on the substrate and comprising at least 80 wt. % yttria, the corrosion-resistant coating directly contacting the substrate such that the ceramic article is free of intervening layers, including thermally reacted interlayers, between the substrate and the corrosion-resistant coating, the corrosion-resistant coating having an adhesion strength not less than 20 MPa.
2. The ceramic article or claim 1 , wherein the corrosion-resistant coating comprises at least 90 wt. % yttria.
3. The ceramic article of claim 2 , wherein the corrosion-resistant coating comprises at least 95 wt. % yttria.
4. The article of claim 1 , wherein the ceramic article comprises a component of a semiconductor processing apparatus.
5. The article of claim 4 , wherein the component is a chamber wall.
6. The article of claim 5 , wherein the component is a chamber lid.
7. The article of claim 5 , wherein the component is a chamber sidewall.
8. The article of claim 1 , wherein the corrosion resistant layer has an adhesion strength of not less than 25 MPa.
9. The article of claim 1 , wherein the corrosion resistant layer has an adhesion strength of not less than 30 MPa.
10. The article of claim 1 , wherein the corrosion resistant layer is deposited on the ceramic base material by thermal spraying.
11. The article of claim 1 , wherein the corrosion resistant coating has an average grain size not greater than about 0.5 microns.
12. The article of claim 1 wherein the substrate consists essentially of αalumina.
13. The article of claim 11 , wherein the average grain size is not greater than about 0.3 microns.