Method of fabricating electronic component using resist structure with no undercut
View Patent ↗A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.
1. A method for milling a structure, comprising:
adding a single- or multi-layer photoresist having no undercut to a surface of a structure to be milled, the surface to be milled defining a plane;
performing a continuous milling process on the structure to be milled having the photoresist thereon, the milling process including:
continuously milling the structure between high incidence and razing incidence;
repeating the continuous milling process at least one more time.
2. The method as recited in claim 1 , wherein the milling is ion milling.
3. The method as recited in claim 1 , wherein high incidence is defined as about 65 to about 90 degrees from the plane of the surface being milled.
4. The method as recited in claim 1 , wherein high incidence is defined as about 70 to about 90 degrees from the plane of the surface being milled.
5. The method as recited in claim 1 , wherein razing incidence is defined as about 5 to about 30 degrees from the plane of the surface being milled.
6. The method as recited in claim 1 , wherein a ratio of an amount of time spent milling at razing incidence to an amount of time spent milling at high incidence is between about 0.3 and about 2.
7. The method as recited in claim 1 , wherein the milling process is repeated at least 4 more times.
8. The method as recited in claim 1 , wherein the structure is milled only at high incidence and razing incidence.
9. The method as recited in claim 1 , wherein high incidence is about 75 to about 90 degrees from the plane of the surface being milled, wherein razing incidence is about 0 to about 30 degrees from the plane of the surface being milled.
10. A method for milling a structure, comprising:
adding a single- or multi-layer photoresist having no undercut to a surface of a structure to be milled, the surface to be milled defining a plane;
performing a multi-step milling process on the structure to be milled having the photoresist thereon, the milling process including:
milling the structure at high incidence;
milling the structure at razing incidence; and
repeating the multi-step milling process at least one more time,
wherein the structure is milled at high incidence, at razing incidence, and at a third incidence between high and razing incidence.
11. The method as recited in claim 1 , wherein the structure is a magnetic sensor.
12. A method for milling a structure, comprising:
adding and patterning a single- or multi-layer resist having no undercut to a surface of a structure to be milled, the upper surface of the structure to be milled defining a continuous exposed plane in an area immediately surrounding a device being formed except for portions of the upper surface located under the resist;
performing a milling process on the structure to be milled having the resist thereon, the milling process including:
milling the structure at high incidence of greater than 65 to about 90 degrees from the plane of the surface being milled; and
milling the structure at razing incidence of about 0 to about 30 degrees from the plane of the surface being milled.
13. The method as recited in claim 12 , wherein the milling is ion milling.
14. The method as recited in claim 12 , wherein high incidence is defined as about 75 to about 90 degrees from the plane of the surface being milled.
15. The method as recited in claim 12 , wherein a ratio of an amount of time spent milling at razing incidence to an amount of time spent milling at high incidence is between about 0.3 and about 2.
16. The method as recited in claim 12 , wherein the milling process is repeated at least 4 more times.
17. The method as recited in claim 12 , wherein the structure is milled only at high incidence and razing incidence.
18. The method as recited in claim 12 , wherein the structure is milled continuously between high incidence and razing incidence, and further comprising repeating the continuous milling process at least one more time.
19. The method as recited in claim 12 , wherein the structure is milled at high incidence, at razing incidence, and at a third incidence between high and razing incidence.
20. The method as recited in claim 12 , wherein the structure is a magnetic sensor.