Apparatus for patterning a self-aligned coil using a damascene process
View Patent ↗An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.
1. A magnetic transducer, comprising:
a write head, comprising:
a first pole layer;
a pedestal formed at a first end of the first pole layer at the pole tip of the first pole layer;
a backgap formed at a second opposite end of the first pole layer;
a first and second insulator comprising a non-magnetic, non-conductive material deposited between the pedestal and the backgap, the first insulator abutting the pedestal and the second insulator abutting the backgap, the first and second insulator separated by a predetermined distance;
a hard baked resist layer disposed over the first pole layer between the first and second insulator, the hard baked resist layer having coil pockets formed therein, formed between the hard baked resist layer and the first insulator and formed between the hard baked resist layer and the second insulator;
a barrier layer disposed along the walls of the coil pockets;
a seed layer disposed along the barrier layer; and
copper disposed in the coil pockets along the seed layer to form a coil for inducing a magnetic flux.
2. The magnetic transducer of claim 1 further comprising:
a second insulation layer disposed over the copper in the coil pockets and over the first insulation layer and at least a portion of the first and second insulator; and
a second pole layer disposed over the second insulation layer.
3. The magnetic transducer of claim 1 wherein the barrier layer further comprises a tantalum layer and the seed layer further comprises copper.
4. The magnetic transducer of claim 1 further comprising:
a read head, the read head comprising:
a first shield layer;
a second shield layer, the second shield layer functioning as the first pole layer; and
a magnetoresistive element disposed between the first and second shield layers.
5. A magnetic storage device, comprising:
magnetic media for storing data thereon;
a magnetic transducer for reading and writing data on the magnetic media;
a motor for translating the position of the magnetic media; and
an actuator for positioning the magnetic transducer relative to the magnetic media;
wherein the magnetic transducer further comprises:
a write head, the write head further comprises:
a first pole layer;
a pedestal formed at a first end of the first pole layer at the pole tip of the first pole layer;
a backgap formed at a second opposite end of the first pole layer;
a first and second insulator comprising a non-magnetic, non-conductive material deposited between the pedestal and the backgap, the first insulator abutting the pedestal and the second insulator abutting the backgap, the first and second insulator separated by a predetermined distance;
a hard baked resist layer disposed over the first pole layer between the first and second insulator, the hard baked resist layer having coil pockets formed therein, formed between the hard baked resist layer and the first insulator and formed between the hard baked resist layer and the second insulator;
a barrier layer disposed along the walls of the coil pockets;
a seed layer disposed along the barrier layer; and
copper disposed in the coil pockets along the seed layer to form a coil for inducing a magnetic flux.
6. The magnetic storage device of claim 5 further comprising:
a second insulation layer disposed over the copper in the coil pockets and over the first insulation layer and at least a portion of the first and second insulator; and
a second pole layer disposed over the second insulation layer.
7. The magnetic storage device of claim 5 wherein the barrier layer further comprises a tantalum layer and the seed layer further comprises copper.
8. The magnetic storage device of claim 5 further comprising:
a read head, the read head comprising:
a first shield layer;
a second shield layer, the second shield layer functioning as the first pole layer; and
a magnetoresistive element disposed between the first and second shield layers.
9. A magnetic transducer, comprising:
write means for writing data to a magnetic medium, the write means comprising:
means for providing a first pole;
means for providing a pedestal formed at a first end of the means for providing the first pole layer at a pole tip of the means for providing the first pole layer;
backgap means formed at a second opposite end of the first pole layer:
a first and second insulator means comprising a non-magnetic, non-conductive material deposited between the means for providing a pedestal and the means for providing a backgap, the first insulator means abutting the means for providing a pedestal and the second insulator means abutting the means for providing a backgap, the first and second insulator means separated by a predetermined distance:
means for providing a hard baked resist layer disposed over the means for providing a first pole layer and between the first and second insulator means, the means for providing hard baked resist layer having coil pockets formed therein, formed between the means for providing hard baked resist layer and the first insulator means and formed between the means for providing hard baked resist layer and the second insulator means;
means for providing a barrier layer disposed along the walls of the coil pockets;
means for providing a seed layer disposed along the barrier layer; and
copper disposed in the coil pockets along the seed layer to form a coil for inducing a magnetic flux.